Sub-[Formula Omitted] Josephson Junctions for Superconducting Quantum Devices

For high-performance superconducting quantum devices based on Josephson junctions (JJs), decreasing lateral sizes is of great importance. Fabrication of sub-[Formula Omitted] JJs is challenging, due to nonflat surfaces with step heights of up to several 100 nm generated during the fabrication proces...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 2013-06, Vol.23 (3), p.1100504-1100504
Hauptverfasser:	Meckbach, J. M, Merker, M, Buehler, S. J, Ilin, K, Neumeier, B, Kienzle, U, Goldobin, E, Kleiner, R, Koelle, D, Siegel, M
Format:	Artikel
Sprache:	eng
Schlagworte:	Density Devices Electron beam lithography Josephson junctions Multilayers Photolithography Qubits (quantum computing) Superconductivity
Online-Zugang:	Volltext
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