Monolithic CMUT-on-CMOS Integration for Intravascular Ultrasound Applications

One of the most important promises of capacitive micromachined ultrasonic transducer (CMUT) technology is integration with electronics. This approach is required to minimize the parasitic capacitances in the receive mode, especially in catheter-based volumetric imaging arrays, for which the elements...

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Veröffentlicht in:	IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2011-12, Vol.58 (12), p.2659-2667
Hauptverfasser:	Zahorian, Jaime, Hochman, Michael, Xu, Toby, Satir, Sarp, Gurun, Gokce, Karaman, Mustafa, Degertekin, F. Levent
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustics Biological and medical sciences Cardiovascular system Electronics - instrumentation Equipment Design Equipment Failure Analysis Exact sciences and technology Fabrication Fundamental areas of phenomenology (including applications) Image Enhancement - instrumentation Imaging Investigative techniques, diagnostic techniques (general aspects) Medical sciences Metals Micro-Electrical-Mechanical Systems - instrumentation Miniaturization Physics Reproducibility of Results Semiconductors Sensitivity and Specificity Silicon wafers Surface topography Surface treatment Systems Integration Transducers Transduction acoustical devices for the generation and reproduction of sound Ultrasonic investigative techniques Ultrasonic transducers Ultrasonography, Interventional - instrumentation Wires
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