Scalable fabrication of high-power graphene micro-supercapacitors for flexible and on-chip energy storage

The rapid development of miniaturized electronic devices has increased the demand for compact on-chip energy storage. Microscale supercapacitors have great potential to complement or replace batteries and electrolytic capacitors in a variety of applications. However, conventional micro-fabrication techniques have proven to be cumbersome in building cost-effective micro-devices, thus limiting their widespread application. Here we demonstrate a scalable fabrication of graphene micro-supercapacitors over large areas by direct laser writing on graphite oxide films using a standard LightScribe DVD burner. More than 100 micro-supercapacitors can be produced on a single disc in 30 min or less. The devices are built on flexible substrates for flexible electronics and on-chip uses that can be integrated with MEMS or CMOS in a single chip. Remarkably, miniaturizing the devices to the microscale results in enhanced charge-storage capacity and rate capability. These micro-supercapacitors demonstrate a power density of ~200 W cm −3 , which is among the highest values achieved for any supercapacitor. Microscale supercapacitors are promising alternative energy-storage devices; however, their use has been limited by the need for complicated fabrication techniques. This work reports the scalable fabrication of graphene supercapacitors with planar geometry that achieve power densities of up to 200 W cm −3 .