Pulsed laser deposition of aluminum-doped ZnO films at 355 nm

Conducting, transparent films of aluminium-doped ZnO (AZO) have been produced at the laser wavelength 355 nm. The most critical property, the electric resistivity, is up to a factor of 8 above that for films produced at shorter wavelengths. In contrast, the transmission of visible light through the...

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Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2004-09, Vol.79 (4-6), p.1137-1139
Hauptverfasser:	HOLMELUND, E, SCHOU, J, THESTRUP, B, TOUGAARD, S, JOHNSON, E, NIELSEN, M. M
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Condensed matter: electronic structure, electrical, magnetic, and optical properties Conduction Deposition Electrical resistivity Exact sciences and technology Lasers Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films Other semiconductors Physics Pulsed laser deposition Wavelengths Zinc oxide
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