Pulsed laser deposition of aluminum-doped ZnO films at 355 nm
Conducting, transparent films of aluminium-doped ZnO (AZO) have been produced at the laser wavelength 355 nm. The most critical property, the electric resistivity, is up to a factor of 8 above that for films produced at shorter wavelengths. In contrast, the transmission of visible light through the...
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| Veröffentlicht in: | Applied physics. A, Materials science & processing Materials science & processing, 2004-09, Vol.79 (4-6), p.1137-1139 |
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| container_title | Applied physics. A, Materials science & processing |
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| creator | HOLMELUND, E SCHOU, J THESTRUP, B TOUGAARD, S JOHNSON, E NIELSEN, M. M |
| description | Conducting, transparent films of aluminium-doped ZnO (AZO) have been produced at the laser wavelength 355 nm. The most critical property, the electric resistivity, is up to a factor of 8 above that for films produced at shorter wavelengths. In contrast, the transmission of visible light through the films is about 0.9 which is comparable to the transmission through films deposited with short-wavelength lasers. The polycrystalline structure of the films is similar to that of films produced by shorter wavelengths as well. |
| doi_str_mv | 10.1007/s00339-004-2663-5 |
| format | Article |
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| ispartof | Applied physics. A, Materials science & processing, 2004-09, Vol.79 (4-6), p.1137-1139 |
| issn | 0947-8396 1432-0630 |
| language | eng |
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| subjects | Aluminum Condensed matter: electronic structure, electrical, magnetic, and optical properties Conduction Deposition Electrical resistivity Exact sciences and technology Lasers Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films Other semiconductors Physics Pulsed laser deposition Wavelengths Zinc oxide |
| title | Pulsed laser deposition of aluminum-doped ZnO films at 355 nm |
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