From nitride to carbide: control of zirconium-based hard materials film growth and their characterization

High-quality thin films of ZrCyN1-y and the novel tribological material Zr0.8Al0.2CyN1-y have been grown by pulsed reactive crossed-beam laser ablation using Zr and Zr--Al ablation targets, respectively, and a pulsed gas. The gas mixture provided the carbon and nitrogen for the solid-solution films....

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