Design and validation of a novel master-making process chain for organic and large area electronics on flexible substrates

This paper presents a novel process chain for fabrication of replication masters for serial manufacture. The proposed process chain is validated for serial fabrication of (large area) organic electronic devices on flexible substrates. The advantages and limitations of the component technologies in t...

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Veröffentlicht in:	Microelectronic engineering 2010-11, Vol.87 (11), p.2139-2145
Hauptverfasser:	Velkova, V., Lalev, G., Hirshy, H., Scholz, S., Hiitola-Keinänen, J., Gold, H., Haase, A., Hast, J., Stadlober, B., Dimov, S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Chains Cross-disciplinary physics: materials science rheology Cutting Deviation Electroforming Electronics Exact sciences and technology FIB Materials science Metals. Metallurgy Methods of nanofabrication Microelectronic fabrication (materials and surfaces technology) Nanocomposites Nanomaterials Nanoscale pattern formation Nanostructure Nickel Organic electronics OTFT Photolithography Physics Process chain Production techniques R2R Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Serials Tool manufacture Transistors UV-NIL
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