Excimer ArF laser with an output energy of 1.3 J at 2.0% efficiency on the He:Ar:F2 mixture

In this paper it is shown that to achieve a maximum efficiency and high output energy of an ArF (193 nm) excimer laser, one should use optimal pump intensity. It has been shown experimentally that the optimal pump intensity for an ArF excimer laser with the mixture of He:Ar:F2 has a value of 4.5--5....

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Veröffentlicht in:	Applied physics. B, Lasers and optics Lasers and optics, 2005-12, Vol.81 (8), p.1113-1117
Hauptverfasser:	Razhev, A.M., Zhupikov, A.A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Conductors (devices) Energy use Excimer lasers Inductance Lasers Optimization Pulse duration Pumps
Online-Zugang:	Volltext
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