Three-dimensional opto-fluidic devices fabricated by ultrashort laser pulses for high throughput single cell detection and processing

Three-dimensional flow-through microchannels were fabricated inside bulk fused silica glass via ultrashort pulsed laser direct writing. The device fabrication sequence takes advantage of the nonlinear volumetric absorption in glass and the subsequent preferential chemical etching process. Optical wa...

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Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2009-08, Vol.96 (2), p.385-390
Hauptverfasser:	Hwang, David J., Kim, Moosung, Hiromatsu, Kuniaki, Jeon, Hojeong, Grigoropoulos, Costas P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Channels Characterization and Evaluation of Materials Condensed Matter Physics Conduits Devices Exact sciences and technology Fluidics Fundamental areas of phenomenology (including applications) Glass Lasers Machines Manufacturing Microchannels Nanotechnology Nonlinear optics Optical and Electronic Materials Optical elements, devices, and systems Optical waveguides and coupleurs Optics Physics Physics and Astronomy Processes Red blood cells Surfaces and Interfaces Thin Films Ultrafast processes optical pulse generation and pulse compression
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