Ion beam assisted smoothing of optical surfaces

In this work different ion-beam techniques demonstrate their capability for surface-roughness reduction down to the sub-nanometer scale. In ion beam direct smoothing, favorable characteristics in the development of surface topography are exploited and smoothing with the help of planarization layers...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2004-03, Vol.78 (5), p.651-654
Hauptverfasser:	Fechner, R., Flamm, D., Frank, W., Schindler, A., Frost, F., Ziberi, B.
Format:	Artikel
Sprache:	eng
Schlagworte:	Focusing Ion beams Mean square values Optimization Reduction Silicon substrates Smoothing Topography
Online-Zugang:	Volltext
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