Design of Microstereolithography System Based on Dynamic Image Projection for Fabrication of Three-Dimensional Microstructures

As demands for complex microstructures with high aspect ratios have increased, the existing methods, MEMS and LIGA, have had difficulties coping with the number of masks and fabricable heights. A microstereolithography technology can meet these demands because it has no need of masks and is capable...

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Veröffentlicht in:	Journal of mechanical science and technology 2006-12, Vol.20 (12), p.2094-2104
Hauptverfasser:	Choi, Jae Won, Ha, Young Myoung, Lee, Seok Hee, Choi, Kyung Hyun
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Demand Dynamical systems Dynamics Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Foundry engineering High aspect ratio Instruments, apparatus, components and techniques common to several branches of physics and astronomy Integrated optics. Optical fibers and wave guides Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Metals. Metallurgy Micromechanical devices and systems Microstructure Optical and optoelectronic circuits Optical design Other casting methods. Solidification Physics Precision engineering, watch making Production techniques Three dimensional
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