Micromachining of crosslinked PTFE by direct photo-etching using synchrotron radiation
Micromachining of crosslinked PTFE (polytetrafluoroethylene) using synchrotron radiation direct photo‐etching method has been demonstrated. High aspect‐ratio microfabrication was carried out. The etching rate of crosslinked PTFE was higher than that of non‐crosslinked PTFE. Through the etching rate...
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| Veröffentlicht in: | Macromolecular symposia. 2002-05, Vol.181 (1), p.201-212 |
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| container_title | Macromolecular symposia. |
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| creator | Yamaguchi, Daichi Katoh, Takanori Sato, Yasunori Ikeda, Shigetoshi Hirose, Masaoki Aoki, Yasushi Iida, Minoru Oshima, Akihiro Tabata, Yoneho Washio, Masakazu |
| description | Micromachining of crosslinked PTFE (polytetrafluoroethylene) using synchrotron radiation direct photo‐etching method has been demonstrated. High aspect‐ratio microfabrication was carried out. The etching rate of crosslinked PTFE was higher than that of non‐crosslinked PTFE. Through the etching rate measurements of various samples, it was found that synchrotron radiation etching rate of crosslinked PTFE only depends on the degree of crosslinking, neither molecular weight nor crystallinity. The effect of molecular motion on etching process was discussed from temperature dependence data on etching rate. Furthermore, the surface region of synchrotron radiation irradiated sample was investigated by Fourier transform infrared spectroscopy and the experimental result showed that the modification induced by synchrotron radiation proceeded before desorption. |
| doi_str_mv | 10.1002/1521-3900(200205)181:1<201::AID-MASY201>3.0.CO;2-M |
| format | Article |
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High aspect‐ratio microfabrication was carried out. The etching rate of crosslinked PTFE was higher than that of non‐crosslinked PTFE. Through the etching rate measurements of various samples, it was found that synchrotron radiation etching rate of crosslinked PTFE only depends on the degree of crosslinking, neither molecular weight nor crystallinity. The effect of molecular motion on etching process was discussed from temperature dependence data on etching rate. 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Furthermore, the surface region of synchrotron radiation irradiated sample was investigated by Fourier transform infrared spectroscopy and the experimental result showed that the modification induced by synchrotron radiation proceeded before desorption.</description><subject>Crosslinking</subject><subject>Crystallinity</subject><subject>Etching</subject><subject>Fourier transforms</subject><subject>Infrared spectroscopy</subject><subject>Micromachining</subject><subject>Polytetrafluoroethylenes</subject><subject>Synchrotron radiation</subject><issn>1022-1360</issn><issn>1521-3900</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2002</creationdate><recordtype>article</recordtype><recordid>eNqVkNFu0zAUhiMEEmPwDrkcFy7n2ImdFIRUha2baCkao4iro9RxVrM0KXYq1rfHIWNX3HBj-7d-f0f-omiKMEEA_gZTjkzkAGc8REhfY4ZTfMcBp9PZ1Qe2nH35HsJ7MYFJsXrL2fJJdPL46Gk4A-cMhYTn0QvvfwBAnis8idZLq123K_XWtra9jbs6Dtn7xrZ3poo_31ycx5tjXFlndB_vt13fMdMP7dv44IfVH1u9dV3vujZ2ZWXL3nbty-hZXTbevHrYT6OvF-c3xSVbrOZXxWzBdJJIZNUGkoznaSJrlQEKBYk0OhEp12aDKKoSyjRXOdY5bOpcZ0rXlcl0aqREJWpxGp2N3L3rfh6M72lnvTZNU7amO3hCLqUKIzIZqtdj9c__nKlp7-yudEdCoEEyDb5o8EWjZAqSCUNAoiCZHiSTIKBiRZyWAboeob9sY47_Q_w38O9VALMRbH1v7h_BpbsjqYRK6dunORWLJP84v15TKn4D5pScyw</recordid><startdate>200205</startdate><enddate>200205</enddate><creator>Yamaguchi, Daichi</creator><creator>Katoh, Takanori</creator><creator>Sato, Yasunori</creator><creator>Ikeda, Shigetoshi</creator><creator>Hirose, Masaoki</creator><creator>Aoki, Yasushi</creator><creator>Iida, Minoru</creator><creator>Oshima, Akihiro</creator><creator>Tabata, Yoneho</creator><creator>Washio, Masakazu</creator><general>WILEY-VCH Verlag GmbH</general><general>WILEY‐VCH Verlag GmbH</general><scope>BSCLL</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>200205</creationdate><title>Micromachining of crosslinked PTFE by direct photo-etching using synchrotron radiation</title><author>Yamaguchi, Daichi ; Katoh, Takanori ; Sato, Yasunori ; Ikeda, Shigetoshi ; Hirose, Masaoki ; Aoki, Yasushi ; Iida, Minoru ; Oshima, Akihiro ; Tabata, Yoneho ; Washio, Masakazu</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c4461-db04829546f780137046ec4352ceb113da0a59791f90bf9c87cfde8c5e66173f3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2002</creationdate><topic>Crosslinking</topic><topic>Crystallinity</topic><topic>Etching</topic><topic>Fourier transforms</topic><topic>Infrared spectroscopy</topic><topic>Micromachining</topic><topic>Polytetrafluoroethylenes</topic><topic>Synchrotron radiation</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Yamaguchi, Daichi</creatorcontrib><creatorcontrib>Katoh, Takanori</creatorcontrib><creatorcontrib>Sato, Yasunori</creatorcontrib><creatorcontrib>Ikeda, Shigetoshi</creatorcontrib><creatorcontrib>Hirose, Masaoki</creatorcontrib><creatorcontrib>Aoki, Yasushi</creatorcontrib><creatorcontrib>Iida, Minoru</creatorcontrib><creatorcontrib>Oshima, Akihiro</creatorcontrib><creatorcontrib>Tabata, Yoneho</creatorcontrib><creatorcontrib>Washio, Masakazu</creatorcontrib><collection>Istex</collection><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Macromolecular symposia.</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Yamaguchi, Daichi</au><au>Katoh, Takanori</au><au>Sato, Yasunori</au><au>Ikeda, Shigetoshi</au><au>Hirose, Masaoki</au><au>Aoki, Yasushi</au><au>Iida, Minoru</au><au>Oshima, Akihiro</au><au>Tabata, Yoneho</au><au>Washio, Masakazu</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Micromachining of crosslinked PTFE by direct photo-etching using synchrotron radiation</atitle><jtitle>Macromolecular symposia.</jtitle><addtitle>Macromol. Symp</addtitle><date>2002-05</date><risdate>2002</risdate><volume>181</volume><issue>1</issue><spage>201</spage><epage>212</epage><pages>201-212</pages><issn>1022-1360</issn><eissn>1521-3900</eissn><abstract>Micromachining of crosslinked PTFE (polytetrafluoroethylene) using synchrotron radiation direct photo‐etching method has been demonstrated. High aspect‐ratio microfabrication was carried out. The etching rate of crosslinked PTFE was higher than that of non‐crosslinked PTFE. Through the etching rate measurements of various samples, it was found that synchrotron radiation etching rate of crosslinked PTFE only depends on the degree of crosslinking, neither molecular weight nor crystallinity. The effect of molecular motion on etching process was discussed from temperature dependence data on etching rate. 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| source | Wiley Online Library Journals Frontfile Complete |
| subjects | Crosslinking Crystallinity Etching Fourier transforms Infrared spectroscopy Micromachining Polytetrafluoroethylenes Synchrotron radiation |
| title | Micromachining of crosslinked PTFE by direct photo-etching using synchrotron radiation |
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