Measurement of microstructure in micro electro mechanical systems using optical interferometric microscope

An automatic measurement system for micro electro mechanical element with optical interferometric microscope is presented in the paper. The system introduces a novel method to calculate the central dark fringe (intensity minimum) and central bright fringe (intensity maximum) in the image. The changi...

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Veröffentlicht in:	Indian journal of pure & applied physics 2012-09, Vol.50 (9), p.641-649
Hauptverfasser:	Lin, Chern-Sheng, Fu, Shu-Hsien, Yen, Mau-Shiun, Tsou, Chingfu, Lai, Teng-Hsien
Format:	Artikel
Sprache:	eng
Schlagworte:	Asymmetry Indian Interference fringes Interferometry Mathematical analysis Microscopes Three dimensional
Online-Zugang:	Volltext
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