Measurement of microstructure in micro electro mechanical systems using optical interferometric microscope
An automatic measurement system for micro electro mechanical element with optical interferometric microscope is presented in the paper. The system introduces a novel method to calculate the central dark fringe (intensity minimum) and central bright fringe (intensity maximum) in the image. The changi...
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| Veröffentlicht in: | Indian journal of pure & applied physics 2012-09, Vol.50 (9), p.641-649 |
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| container_end_page | 649 |
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| container_issue | 9 |
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| container_title | Indian journal of pure & applied physics |
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| creator | Lin, Chern-Sheng Fu, Shu-Hsien Yen, Mau-Shiun Tsou, Chingfu Lai, Teng-Hsien |
| description | An automatic measurement system for micro electro mechanical element with optical interferometric microscope is presented in the paper. The system introduces a novel method to calculate the central dark fringe (intensity minimum) and central bright fringe (intensity maximum) in the image. The changing of height in asymmetric micro-structure, based on the phase definition of interference fringe can be calculated. Interferometric image information is derived through image processing method, and innovated contour line algorithm is used to build up micro-structure 3D profile. In the experiments, the total processing time for five parts of element could be reduced to less than 5 s and the system error is less than 0.02 mu m. |
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The system introduces a novel method to calculate the central dark fringe (intensity minimum) and central bright fringe (intensity maximum) in the image. The changing of height in asymmetric micro-structure, based on the phase definition of interference fringe can be calculated. Interferometric image information is derived through image processing method, and innovated contour line algorithm is used to build up micro-structure 3D profile. 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The system introduces a novel method to calculate the central dark fringe (intensity minimum) and central bright fringe (intensity maximum) in the image. The changing of height in asymmetric micro-structure, based on the phase definition of interference fringe can be calculated. Interferometric image information is derived through image processing method, and innovated contour line algorithm is used to build up micro-structure 3D profile. In the experiments, the total processing time for five parts of element could be reduced to less than 5 s and the system error is less than 0.02 mu m.</description><subject>Asymmetry</subject><subject>Indian</subject><subject>Interference fringes</subject><subject>Interferometry</subject><subject>Mathematical analysis</subject><subject>Microscopes</subject><subject>Three dimensional</subject><issn>0019-5596</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><recordid>eNotjD1PwzAUAD2ARCn8B48skezETu0RVXxJRV1grpzXZ3AV28HPGfj3RLTTnW64K7YSQtpGa9vfsFuikxC9trZbsdM7OpoLRkyVZ89jgJKplhnqUnlI58JxRKgLI8K3SwHcyOmXKkbiM4X0xfNU_2tIFYvHkiPWEuAyhDzhHbv2biS8v3DNPp-fPravzW7_8rZ93DWTNKY2SoNqjdTy6DcbdK0cjG1R6aNB5wzoxaSAoe9cL5xopUAH0ivU0HurhqFbs4fzdyr5Z0aqhxgIcBxdwjzTQbattEJ1SnV_JTtYNw</recordid><startdate>20120901</startdate><enddate>20120901</enddate><creator>Lin, Chern-Sheng</creator><creator>Fu, Shu-Hsien</creator><creator>Yen, Mau-Shiun</creator><creator>Tsou, Chingfu</creator><creator>Lai, Teng-Hsien</creator><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>20120901</creationdate><title>Measurement of microstructure in micro electro mechanical systems using optical interferometric microscope</title><author>Lin, Chern-Sheng ; Fu, Shu-Hsien ; Yen, Mau-Shiun ; Tsou, Chingfu ; Lai, Teng-Hsien</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-p188t-45c428151df77ea21b892e45d8eaa8c545d10cb63a60a0210eac1f4e5c6f94bb3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2012</creationdate><topic>Asymmetry</topic><topic>Indian</topic><topic>Interference fringes</topic><topic>Interferometry</topic><topic>Mathematical analysis</topic><topic>Microscopes</topic><topic>Three dimensional</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Lin, Chern-Sheng</creatorcontrib><creatorcontrib>Fu, Shu-Hsien</creatorcontrib><creatorcontrib>Yen, Mau-Shiun</creatorcontrib><creatorcontrib>Tsou, Chingfu</creatorcontrib><creatorcontrib>Lai, Teng-Hsien</creatorcontrib><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Indian journal of pure & applied physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Lin, Chern-Sheng</au><au>Fu, Shu-Hsien</au><au>Yen, Mau-Shiun</au><au>Tsou, Chingfu</au><au>Lai, Teng-Hsien</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Measurement of microstructure in micro electro mechanical systems using optical interferometric microscope</atitle><jtitle>Indian journal of pure & applied physics</jtitle><date>2012-09-01</date><risdate>2012</risdate><volume>50</volume><issue>9</issue><spage>641</spage><epage>649</epage><pages>641-649</pages><issn>0019-5596</issn><abstract>An automatic measurement system for micro electro mechanical element with optical interferometric microscope is presented in the paper. The system introduces a novel method to calculate the central dark fringe (intensity minimum) and central bright fringe (intensity maximum) in the image. The changing of height in asymmetric micro-structure, based on the phase definition of interference fringe can be calculated. Interferometric image information is derived through image processing method, and innovated contour line algorithm is used to build up micro-structure 3D profile. In the experiments, the total processing time for five parts of element could be reduced to less than 5 s and the system error is less than 0.02 mu m.</abstract><tpages>9</tpages></addata></record> |
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| source | DOAJ Directory of Open Access Journals; EZB-FREE-00999 freely available EZB journals; Free Full-Text Journals in Chemistry |
| subjects | Asymmetry Indian Interference fringes Interferometry Mathematical analysis Microscopes Three dimensional |
| title | Measurement of microstructure in micro electro mechanical systems using optical interferometric microscope |
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