Submicrometer-wide amorphous and polycrystalline anatase TiO2 waveguides for microphotonic devices

We demonstrate amorphous and polycrystalline anatase TiO(2) thin films and submicrometer-wide waveguides with promising optical properties for microphotonic devices. We deposit both amorphous and polycrystalline anatase TiO(2) using reactive sputtering and define waveguides using electron-beam litho...

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Veröffentlicht in:	Optics express 2012-10, Vol.20 (21), p.23821-23831
Hauptverfasser:	Bradley, Jonathan D B, Evans, Christopher C, Choy, Jennifer T, Reshef, Orad, Deotare, Parag B, Parsy, François, Phillips, Katherine C, Lončar, Marko, Mazur, Eric
Format:	Artikel
Sprache:	eng
Schlagworte:	Crystallization - methods Equipment Design Equipment Failure Analysis Miniaturization Nanoparticles - chemistry Nanoparticles - ultrastructure Nanotechnology - instrumentation Photons Surface Plasmon Resonance - instrumentation Titanium - chemistry
Online-Zugang:	Volltext
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