On the reliability of reverse engineering results

Determination of actual parameters of manufactured optical coatings (reverse engineering of optical coatings) provides feedback to the design-production chain and thus plays an important role in raising the quality of optical coatings production. In this paper, the reliability of reverse engineering...

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Veröffentlicht in:	Applied optics (2004) 2012-08, Vol.51 (22), p.5543-5551
Hauptverfasser:	Amotchkina, Tatiana V, Trubetskov, Michael K, Pervak, Vladimir, Romanov, Boris, Tikhonravov, Alexander V
Format:	Artikel
Sprache:	eng
Schlagworte:	Ellipsometry Error analysis Error detection Monitoring On-line systems Optical coatings Reverse engineering Transmittance
Online-Zugang:	Volltext
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