The Electrostatic Tangential Resistance of the MEMS Moving Plate with Bumps Considering the Edge Effects

Friction force is present in most microelectromechanical systems (MEMS), since they have a large ratio of surface area to their volume. To improve the performance and reliability of MEMS devices, it is necessary to fully understand the effect of friction which exists in the majority of MEMS. For the...

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Veröffentlicht in:	Materials science forum 2011-01, Vol.694, p.497-501
Hauptverfasser:	Zhou, Ling, Shen, Xue Jin, Wang, Zhen Liang
Format:	Artikel
Sprache:	eng
Schlagworte:	Electric potential Electrostatics Friction Mathematical analysis Microelectromechanical systems Simulation Surface roughness Voltage
Online-Zugang:	Volltext
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