Responses of simple optical standing wave sensors

Optical standing wave sensors have been manufactured by amorphous silicon deposition. The responses of these sensors, when subjected to standing waves, have been calculated and measured. It is shown that the responses are different depending on the way the standing wave is created. The responses als...

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Bibliographische Detailangaben

Veröffentlicht in:	Applied optics (2004) 2012-06, Vol.51 (16), p.3109-3113
Hauptverfasser:	de Haan, Victor-Otto, Santbergen, Rudi, Tijssen, Martijn, Zeman, Miro
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous silicon Construction Deposition Error analysis Mathematical models Permissible error Sensors Standing waves
Online-Zugang:	Volltext
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