Responses of simple optical standing wave sensors
Optical standing wave sensors have been manufactured by amorphous silicon deposition. The responses of these sensors, when subjected to standing waves, have been calculated and measured. It is shown that the responses are different depending on the way the standing wave is created. The responses als...
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Veröffentlicht in: | Applied optics (2004) 2012-06, Vol.51 (16), p.3109-3113 |
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container_title | Applied optics (2004) |
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creator | de Haan, Victor-Otto Santbergen, Rudi Tijssen, Martijn Zeman, Miro |
description | Optical standing wave sensors have been manufactured by amorphous silicon deposition. The responses of these sensors, when subjected to standing waves, have been calculated and measured. It is shown that the responses are different depending on the way the standing wave is created. The responses also depend on the thickness and material properties of the layers used to create the sensors. Quantitative agreement between measurements and model calculations can be obtained by including alignment errors, incoherent light interaction and scaling factors. The simple construction of the sensors allows for a broad application range. |
doi_str_mv | 10.1364/AO.51.003109 |
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source | Alma/SFX Local Collection; Optica Publishing Group Journals |
subjects | Amorphous silicon Construction Deposition Error analysis Mathematical models Permissible error Sensors Standing waves |
title | Responses of simple optical standing wave sensors |
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