Responses of simple optical standing wave sensors

Optical standing wave sensors have been manufactured by amorphous silicon deposition. The responses of these sensors, when subjected to standing waves, have been calculated and measured. It is shown that the responses are different depending on the way the standing wave is created. The responses als...

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Veröffentlicht in:Applied optics (2004) 2012-06, Vol.51 (16), p.3109-3113
Hauptverfasser: de Haan, Victor-Otto, Santbergen, Rudi, Tijssen, Martijn, Zeman, Miro
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container_issue 16
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container_title Applied optics (2004)
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creator de Haan, Victor-Otto
Santbergen, Rudi
Tijssen, Martijn
Zeman, Miro
description Optical standing wave sensors have been manufactured by amorphous silicon deposition. The responses of these sensors, when subjected to standing waves, have been calculated and measured. It is shown that the responses are different depending on the way the standing wave is created. The responses also depend on the thickness and material properties of the layers used to create the sensors. Quantitative agreement between measurements and model calculations can be obtained by including alignment errors, incoherent light interaction and scaling factors. The simple construction of the sensors allows for a broad application range.
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source Alma/SFX Local Collection; Optica Publishing Group Journals
subjects Amorphous silicon
Construction
Deposition
Error analysis
Mathematical models
Permissible error
Sensors
Standing waves
title Responses of simple optical standing wave sensors
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