Solar induced chemical vapor deposition of carbon from ethanol

Solar induced chemical vapor deposition (S-CVD) process using the concentrated solar radiation flux provided at the focus of a Fresnel lens (diameter 40 cm, focal length 40 cm) has been investigated. Carbon deposits on silicon and on silica have been produced using ethanol as the carbon precursor, h...

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Veröffentlicht in:	Vacuum 2012-07, Vol.86 (12), p.2126-2128
Hauptverfasser:	Lunazzi, Francisco, Peterlevitz, Alfredo Carlos, Ceragioli, Helder José, Lunazzi, José J., Baranauskas, Vítor
Format:	Artikel
Sprache:	eng
Schlagworte:	Carbon Chemical vapor deposition Deposition Ethanol Ethyl alcohol Flux Fresnel lens optics Precursors Scanning electron microscopy Solar chemical vapor deposition Solar-CVD
Online-Zugang:	Volltext
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