Fine structure analysis of spherical carbon particles produced in a methane plasma

We have investigated the growth mechanism as well as the structure of spherical carbon particles grown to micron sizes in a low pressure columnar CH4/H2 plasma by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). From SEM observations, we found a fact that the spherical...

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Veröffentlicht in:Diamond and related materials 2012-07, Vol.27-28, p.10-13
Hauptverfasser: Onoue, M., Okado, H., Ikari, T., Naitoh, M., Nagai, T., Shoji, F.
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container_end_page 13
container_issue
container_start_page 10
container_title Diamond and related materials
container_volume 27-28
creator Onoue, M.
Okado, H.
Ikari, T.
Naitoh, M.
Nagai, T.
Shoji, F.
description We have investigated the growth mechanism as well as the structure of spherical carbon particles grown to micron sizes in a low pressure columnar CH4/H2 plasma by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). From SEM observations, we found a fact that the spherical carbon particles were formed not on the substrate surface but in the sheath. From TEM observations, it was clarified that the spherical carbon particles were composed of graphite onions ranging from 2 to 10nm and diamonds of ca. 5nm were growing at the same time. ► The growth of spherical carbon particles of micron sizes was discovered. ► The spherical particles are produced at the plasma sheath. ► The particles are composed of graphite onions ranging from 2 to 10nm. ► The diamond crystalline grows together with the graphite onion.
doi_str_mv 10.1016/j.diamond.2012.05.006
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subjects Carbon
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Diamond
Exact sciences and technology
Fine structure
Fullerenes and related materials
diamonds, graphite
Graphite
Graphite onion
Low pressure
Materials science
Methane
Methods of crystal growth
physics of crystal growth
Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals
Onions
p-CVD
Physics
Scanning electron microscopy
SEM
Specific materials
Spherical carbon particle
Structure of solids and liquids
crystallography
TEM
Theory and models of crystal growth
physics of crystal growth, crystal morphology and orientation
Transmission electron microscopy
title Fine structure analysis of spherical carbon particles produced in a methane plasma
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