Effects of Excess PbO and Zr/Ti Ratio on Microstructure and Electrical Properties of PZT Films

Lead zirconate titanate films with different Zr/Ti ratios were fabricated on a platinized silicon substrate using radio frequency magnetron sputtering. Crack‐free films with a rhombohedral, morphotropic phase boundary and tetragonal compositions were deposited using single oxide targets containing v...

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Veröffentlicht in:	Journal of the American Ceramic Society 2008-09, Vol.91 (9), p.2923-2927
Hauptverfasser:	Park, Chee-Sung, Lee, Sung-Mi, Kim, Hyoun-Ee
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Building materials. Ceramics. Glasses Ceramic industries Ceramics Chemical industry and chemicals Correlation Correlation analysis Cracks Dielectric properties Electrotechnical and electronic ceramics Exact sciences and technology Grain size Lead Lead zirconate titanates Magnetron sputtering Materials science Microstructure Morphology Phase boundaries Technical ceramics Zirconium
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