Effects of Excess PbO and Zr/Ti Ratio on Microstructure and Electrical Properties of PZT Films
Lead zirconate titanate films with different Zr/Ti ratios were fabricated on a platinized silicon substrate using radio frequency magnetron sputtering. Crack‐free films with a rhombohedral, morphotropic phase boundary and tetragonal compositions were deposited using single oxide targets containing v...
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| Veröffentlicht in: | Journal of the American Ceramic Society 2008-09, Vol.91 (9), p.2923-2927 |
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| creator | Park, Chee-Sung Lee, Sung-Mi Kim, Hyoun-Ee |
| description | Lead zirconate titanate films with different Zr/Ti ratios were fabricated on a platinized silicon substrate using radio frequency magnetron sputtering. Crack‐free films with a rhombohedral, morphotropic phase boundary and tetragonal compositions were deposited using single oxide targets containing various amounts of excess PbO. When the films showed a (111) preferred orientation, there were no cracks, regardless of the phase, and their microstructures were similar to one another. As the Zr/Ti ratio was changed, the amount of excess PbO necessary for the stoichiometry of the films also changed. When they had a stoichiometric composition, the films had a small grain size and similar microstructures. Moreover, their structural stability increased when the grains had an equiaxed morphology. The ferroelectric and piezoelectric properties of the films were characterized and correlated with their phase and microstructure. |
| doi_str_mv | 10.1111/j.1551-2916.2008.02567.x |
| format | Article |
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Crack‐free films with a rhombohedral, morphotropic phase boundary and tetragonal compositions were deposited using single oxide targets containing various amounts of excess PbO. When the films showed a (111) preferred orientation, there were no cracks, regardless of the phase, and their microstructures were similar to one another. As the Zr/Ti ratio was changed, the amount of excess PbO necessary for the stoichiometry of the films also changed. When they had a stoichiometric composition, the films had a small grain size and similar microstructures. Moreover, their structural stability increased when the grains had an equiaxed morphology. The ferroelectric and piezoelectric properties of the films were characterized and correlated with their phase and microstructure.</description><identifier>ISSN: 0002-7820</identifier><identifier>EISSN: 1551-2916</identifier><identifier>DOI: 10.1111/j.1551-2916.2008.02567.x</identifier><identifier>CODEN: JACTAW</identifier><language>eng</language><publisher>Malden, USA: Blackwell Publishing Inc</publisher><subject>Applied sciences ; Building materials. Ceramics. Glasses ; Ceramic industries ; Ceramics ; Chemical industry and chemicals ; Correlation ; Correlation analysis ; Cracks ; Dielectric properties ; Electrotechnical and electronic ceramics ; Exact sciences and technology ; Grain size ; Lead ; Lead zirconate titanates ; Magnetron sputtering ; Materials science ; Microstructure ; Morphology ; Phase boundaries ; Technical ceramics ; Zirconium</subject><ispartof>Journal of the American Ceramic Society, 2008-09, Vol.91 (9), p.2923-2927</ispartof><rights>2008 The American Ceramic Society</rights><rights>2008 INIST-CNRS</rights><rights>Copyright American Ceramic Society Sep 2008</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c4937-38dc130035fd2f7041107be9ee308d31c47a55507f3d14454bd3fc6c6bd58cc63</citedby><cites>FETCH-LOGICAL-c4937-38dc130035fd2f7041107be9ee308d31c47a55507f3d14454bd3fc6c6bd58cc63</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://onlinelibrary.wiley.com/doi/full/10.1111%2Fj.1551-2916.2008.02567.x$$EHTML$$P50$$Gwiley$$H</linktohtml><link.rule.ids>314,776,780,1411,27901,27902,45551</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=20659736$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Park, Chee-Sung</creatorcontrib><creatorcontrib>Lee, Sung-Mi</creatorcontrib><creatorcontrib>Kim, Hyoun-Ee</creatorcontrib><title>Effects of Excess PbO and Zr/Ti Ratio on Microstructure and Electrical Properties of PZT Films</title><title>Journal of the American Ceramic Society</title><description>Lead zirconate titanate films with different Zr/Ti ratios were fabricated on a platinized silicon substrate using radio frequency magnetron sputtering. Crack‐free films with a rhombohedral, morphotropic phase boundary and tetragonal compositions were deposited using single oxide targets containing various amounts of excess PbO. When the films showed a (111) preferred orientation, there were no cracks, regardless of the phase, and their microstructures were similar to one another. As the Zr/Ti ratio was changed, the amount of excess PbO necessary for the stoichiometry of the films also changed. When they had a stoichiometric composition, the films had a small grain size and similar microstructures. Moreover, their structural stability increased when the grains had an equiaxed morphology. The ferroelectric and piezoelectric properties of the films were characterized and correlated with their phase and microstructure.</description><subject>Applied sciences</subject><subject>Building materials. Ceramics. Glasses</subject><subject>Ceramic industries</subject><subject>Ceramics</subject><subject>Chemical industry and chemicals</subject><subject>Correlation</subject><subject>Correlation analysis</subject><subject>Cracks</subject><subject>Dielectric properties</subject><subject>Electrotechnical and electronic ceramics</subject><subject>Exact sciences and technology</subject><subject>Grain size</subject><subject>Lead</subject><subject>Lead zirconate titanates</subject><subject>Magnetron sputtering</subject><subject>Materials science</subject><subject>Microstructure</subject><subject>Morphology</subject><subject>Phase boundaries</subject><subject>Technical ceramics</subject><subject>Zirconium</subject><issn>0002-7820</issn><issn>1551-2916</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2008</creationdate><recordtype>article</recordtype><recordid>eNqNkEFr2zAUx0XZYFnX7yAGg13sPkmWJZ9GF5xuo1nDSBn0UKHIEihz7EyyWfrtJyclh52mi_R4v_fj6Y8QJpCTdK63OeGcZLQiZU4BZA6UlyI_XKDZufEKzQCAZkJSeIPexrhNJalkMUNPtXPWDBH3DtcHY2PEq8091l2DH8P12uMfevA97ju89Cb0cQijGcZgj0TdptHgjW7xKvR7GwZvj6bV4xovfLuL79Brp9tor17uS_SwqNfzL9nd_e3X-c1dZoqKiYzJxhAGwLhrqBNQEAJiYytrGciGEVMIzTkH4VhDioIXm4Y5U5py03BpTMku0ceTdx_636ONg9r5aGzb6s72Y1QEJKVAKa0S-v4fdNuPoUvbKUqErCRjMkHyBE1_jsE6tQ9-p8NzMqkpd7VVU7xqildNuatj7uqQRj-8-HVMybigO-PjeZ5CySvBppU_nbg_vrXP_-1X327m9fGdDNnJ4ONgD2eDDr9U6gqufn6_VQshiiVbSvWZ_QWrhKL_</recordid><startdate>200809</startdate><enddate>200809</enddate><creator>Park, Chee-Sung</creator><creator>Lee, Sung-Mi</creator><creator>Kim, Hyoun-Ee</creator><general>Blackwell Publishing Inc</general><general>Blackwell</general><general>Wiley Subscription Services, Inc</general><scope>BSCLL</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QQ</scope><scope>7SR</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>200809</creationdate><title>Effects of Excess PbO and Zr/Ti Ratio on Microstructure and Electrical Properties of PZT Films</title><author>Park, Chee-Sung ; Lee, Sung-Mi ; Kim, Hyoun-Ee</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c4937-38dc130035fd2f7041107be9ee308d31c47a55507f3d14454bd3fc6c6bd58cc63</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2008</creationdate><topic>Applied sciences</topic><topic>Building materials. Ceramics. Glasses</topic><topic>Ceramic industries</topic><topic>Ceramics</topic><topic>Chemical industry and chemicals</topic><topic>Correlation</topic><topic>Correlation analysis</topic><topic>Cracks</topic><topic>Dielectric properties</topic><topic>Electrotechnical and electronic ceramics</topic><topic>Exact sciences and technology</topic><topic>Grain size</topic><topic>Lead</topic><topic>Lead zirconate titanates</topic><topic>Magnetron sputtering</topic><topic>Materials science</topic><topic>Microstructure</topic><topic>Morphology</topic><topic>Phase boundaries</topic><topic>Technical ceramics</topic><topic>Zirconium</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Park, Chee-Sung</creatorcontrib><creatorcontrib>Lee, Sung-Mi</creatorcontrib><creatorcontrib>Kim, Hyoun-Ee</creatorcontrib><collection>Istex</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Ceramic Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Journal of the American Ceramic Society</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Park, Chee-Sung</au><au>Lee, Sung-Mi</au><au>Kim, Hyoun-Ee</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Effects of Excess PbO and Zr/Ti Ratio on Microstructure and Electrical Properties of PZT Films</atitle><jtitle>Journal of the American Ceramic Society</jtitle><date>2008-09</date><risdate>2008</risdate><volume>91</volume><issue>9</issue><spage>2923</spage><epage>2927</epage><pages>2923-2927</pages><issn>0002-7820</issn><eissn>1551-2916</eissn><coden>JACTAW</coden><abstract>Lead zirconate titanate films with different Zr/Ti ratios were fabricated on a platinized silicon substrate using radio frequency magnetron sputtering. Crack‐free films with a rhombohedral, morphotropic phase boundary and tetragonal compositions were deposited using single oxide targets containing various amounts of excess PbO. When the films showed a (111) preferred orientation, there were no cracks, regardless of the phase, and their microstructures were similar to one another. As the Zr/Ti ratio was changed, the amount of excess PbO necessary for the stoichiometry of the films also changed. When they had a stoichiometric composition, the films had a small grain size and similar microstructures. Moreover, their structural stability increased when the grains had an equiaxed morphology. The ferroelectric and piezoelectric properties of the films were characterized and correlated with their phase and microstructure.</abstract><cop>Malden, USA</cop><pub>Blackwell Publishing Inc</pub><doi>10.1111/j.1551-2916.2008.02567.x</doi><tpages>5</tpages><oa>free_for_read</oa></addata></record> |
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| source | Wiley Online Library Journals Frontfile Complete |
| subjects | Applied sciences Building materials. Ceramics. Glasses Ceramic industries Ceramics Chemical industry and chemicals Correlation Correlation analysis Cracks Dielectric properties Electrotechnical and electronic ceramics Exact sciences and technology Grain size Lead Lead zirconate titanates Magnetron sputtering Materials science Microstructure Morphology Phase boundaries Technical ceramics Zirconium |
| title | Effects of Excess PbO and Zr/Ti Ratio on Microstructure and Electrical Properties of PZT Films |
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