Fabrication of vertical digital silicon optical micromirrors on suspended electrode for guided-wave optical switching applications

This paper presents a novel technological and design study of optical guided-wave MicroElectroMechanical Systems (MEMS) switch. We work on a concept of hermetic assembly in which a MEMS wafer is covered (top–down) by a crossing optical waveguide wafer. The mirrors are designed to be pulled up and in...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2005-09, Vol.123, p.570-583
Hauptverfasser:	Guerre, R., Hibert, C., Burri, Y., Flückiger, Ph, Renaud, Ph
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuators DRIE Electrodes Microelectromechanical systems Micromirrors Optical MEMS Optical switches Optical switching Platforms Silicon Silicon substrates Wafers
Online-Zugang:	Volltext
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