Improvement of electrical and optical properties of molybdenum doped zinc oxide films by introducing hydrogen

► Hydrogen and molybdenum co-doped ZnO TCO films were deposited. ► The HMZO films with low resistivity and high transmittance from 400 to 1100nm. ► Crater-like surface morphology was obtained after etching by diluted HCl. ► The etched HMZO film with root-mean-square roughness of 46.5nm. Doped ZnO fi...

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Veröffentlicht in:	Applied surface science 2012-09, Vol.258 (22), p.8797-8801
Hauptverfasser:	Wang, Yanfeng, Huang, Qian, Wei, Changchun, Zhang, Dekun, Zhao, Ying, Zhang, Xiaodan
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Direct current Exact sciences and technology Flow rate Hydrogen Magnetron sputtering Molybdenum Molybdenum doped ZnO Optical properties Optimization Photovoltaic cells Physics Solar cell Solar cells Transparent conductive oxide Zinc oxide
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