Microstructure, optical and electrical properties of Al-doped ZnO films grown by MOCVD

► Al-doped ZnO films were grown on quartz substrates by MOCVD. ► The preferred orientation of ZnO films decreased with the increase of Al content. ► Decomposition products of TMA bringing down the surface activity of ZnO grains. ► UV emission peak initially red-shifted and then blue-shifted as incre...

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Veröffentlicht in:	Applied surface science 2012-09, Vol.258 (22), p.8595-8598
Hauptverfasser:	Su, Jianfeng, Tang, Chunjuan, Niu, Qiang, Zang, Chunhe, Zhang, Yongsheng, Fu, Zhuxi
Format:	Artikel
Sprache:	eng
Schlagworte:	Al doped Aluminum Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Doping Electrical properties Exact sciences and technology Grain boundaries MOCVD Optical properties Physics Quantum confinement Zinc oxide ZnO
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