High angular resolution slope measuring deflectometry for the characterization of ultra-precise reflective x-ray optics
Slope measuring deflectometry has become a standard technique for inspection of ultra-precise reflective optical elements of synchrotron applications. We will report on the inspection of ultra-precise adaptive synchrotron mirrors (bimorph mirrors) to be used under grazing incidence condition. The me...
Gespeichert in:
| Veröffentlicht in: | Measurement science & technology 2012-07, Vol.23 (7), p.74015-1-8 |
|---|---|
| Hauptverfasser: | , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 1-8 |
|---|---|
| container_issue | 7 |
| container_start_page | 74015 |
| container_title | Measurement science & technology |
| container_volume | 23 |
| creator | Siewert, F Buchheim, J Höft, T Fiedler, S Bourenkov, G Cianci, M Signorato, R |
| description | Slope measuring deflectometry has become a standard technique for inspection of ultra-precise reflective optical elements of synchrotron applications. We will report on the inspection of ultra-precise adaptive synchrotron mirrors (bimorph mirrors) to be used under grazing incidence condition. The measurements were performed at the BESSY-II Optics Laboratory of the Helmholtz Zentrum Berlin using the nanometer optical component measuring machine (NOM). Based on the data obtained by the optical measurements, we in this paper simulate the characteristics of the achievable x-ray focus by ray tracing calculations, demonstrated in the case of bimorph mirrors of the EMBL MX1 beamline for macromolecular crystallography at DESY's synchrotron radiation source PETRA III in Hamburg. |
| doi_str_mv | 10.1088/0957-0233/23/7/074015 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_1038239005</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1038239005</sourcerecordid><originalsourceid>FETCH-LOGICAL-c394t-e2eff9ab448329c251e963832688f47653fa1b8d62e1b6d5a48efaafce8d71913</originalsourceid><addsrcrecordid>eNqFkD1PwzAQhi0EEqXwE5A8soTYcT7sEVVAkZBYYLZc59y6SuJgO0D59bgtYmW6G97n1d2D0DUlt5RwnhNRNRkpGMsLljc5aUpCqxM0o6ymWV0Reopmf5lzdBHClhDSECFm6HNp1xushvXUKY89BNdN0boBh86NgHtQYfJ2WOMWTAc6uh6i32HjPI4bwHqjvNIRvP1WB8wZPHXRq2z0oG2AVHng7Afgr8yrHXZjtDpcojOjugBXv3OO3h7uXxfL7Pnl8Wlx95xpJsqYQQHGCLUqS84KoYuKgqhZ2mvOTdnUFTOKrnhbF0BXdVupkoNRymjgbUMFZXN0c-wdvXufIETZ26Ch69QAbgqSEsYLJgipUrQ6RrV3IaS75ehtr_wuheRetNxLlHuJsmAybQfRiaNHzrpRbt3kh_TQP8wPb-mCgw</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1038239005</pqid></control><display><type>article</type><title>High angular resolution slope measuring deflectometry for the characterization of ultra-precise reflective x-ray optics</title><source>IOP Publishing Journals</source><source>Institute of Physics (IOP) Journals - HEAL-Link</source><creator>Siewert, F ; Buchheim, J ; Höft, T ; Fiedler, S ; Bourenkov, G ; Cianci, M ; Signorato, R</creator><creatorcontrib>Siewert, F ; Buchheim, J ; Höft, T ; Fiedler, S ; Bourenkov, G ; Cianci, M ; Signorato, R</creatorcontrib><description>Slope measuring deflectometry has become a standard technique for inspection of ultra-precise reflective optical elements of synchrotron applications. We will report on the inspection of ultra-precise adaptive synchrotron mirrors (bimorph mirrors) to be used under grazing incidence condition. The measurements were performed at the BESSY-II Optics Laboratory of the Helmholtz Zentrum Berlin using the nanometer optical component measuring machine (NOM). Based on the data obtained by the optical measurements, we in this paper simulate the characteristics of the achievable x-ray focus by ray tracing calculations, demonstrated in the case of bimorph mirrors of the EMBL MX1 beamline for macromolecular crystallography at DESY's synchrotron radiation source PETRA III in Hamburg.</description><identifier>ISSN: 0957-0233</identifier><identifier>EISSN: 1361-6501</identifier><identifier>DOI: 10.1088/0957-0233/23/7/074015</identifier><identifier>CODEN: MSTCEP</identifier><language>eng</language><publisher>IOP Publishing</publisher><subject>adaptive optics ; bimorph mirror ; Bimorphs ; Deflection ; Inspection ; Mathematical analysis ; metrology ; NOM ; Optical components ; slope error ; synchrotron optics ; Synchrotron radiation ; Synchrotrons ; x-ray optics ; X-rays</subject><ispartof>Measurement science & technology, 2012-07, Vol.23 (7), p.74015-1-8</ispartof><rights>2012 IOP Publishing Ltd</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c394t-e2eff9ab448329c251e963832688f47653fa1b8d62e1b6d5a48efaafce8d71913</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1088/0957-0233/23/7/074015/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,780,784,27924,27925,53846,53893</link.rule.ids></links><search><creatorcontrib>Siewert, F</creatorcontrib><creatorcontrib>Buchheim, J</creatorcontrib><creatorcontrib>Höft, T</creatorcontrib><creatorcontrib>Fiedler, S</creatorcontrib><creatorcontrib>Bourenkov, G</creatorcontrib><creatorcontrib>Cianci, M</creatorcontrib><creatorcontrib>Signorato, R</creatorcontrib><title>High angular resolution slope measuring deflectometry for the characterization of ultra-precise reflective x-ray optics</title><title>Measurement science & technology</title><addtitle>MST</addtitle><addtitle>Meas. Sci. Technol</addtitle><description>Slope measuring deflectometry has become a standard technique for inspection of ultra-precise reflective optical elements of synchrotron applications. We will report on the inspection of ultra-precise adaptive synchrotron mirrors (bimorph mirrors) to be used under grazing incidence condition. The measurements were performed at the BESSY-II Optics Laboratory of the Helmholtz Zentrum Berlin using the nanometer optical component measuring machine (NOM). Based on the data obtained by the optical measurements, we in this paper simulate the characteristics of the achievable x-ray focus by ray tracing calculations, demonstrated in the case of bimorph mirrors of the EMBL MX1 beamline for macromolecular crystallography at DESY's synchrotron radiation source PETRA III in Hamburg.</description><subject>adaptive optics</subject><subject>bimorph mirror</subject><subject>Bimorphs</subject><subject>Deflection</subject><subject>Inspection</subject><subject>Mathematical analysis</subject><subject>metrology</subject><subject>NOM</subject><subject>Optical components</subject><subject>slope error</subject><subject>synchrotron optics</subject><subject>Synchrotron radiation</subject><subject>Synchrotrons</subject><subject>x-ray optics</subject><subject>X-rays</subject><issn>0957-0233</issn><issn>1361-6501</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2012</creationdate><recordtype>article</recordtype><recordid>eNqFkD1PwzAQhi0EEqXwE5A8soTYcT7sEVVAkZBYYLZc59y6SuJgO0D59bgtYmW6G97n1d2D0DUlt5RwnhNRNRkpGMsLljc5aUpCqxM0o6ymWV0Reopmf5lzdBHClhDSECFm6HNp1xushvXUKY89BNdN0boBh86NgHtQYfJ2WOMWTAc6uh6i32HjPI4bwHqjvNIRvP1WB8wZPHXRq2z0oG2AVHng7Afgr8yrHXZjtDpcojOjugBXv3OO3h7uXxfL7Pnl8Wlx95xpJsqYQQHGCLUqS84KoYuKgqhZ2mvOTdnUFTOKrnhbF0BXdVupkoNRymjgbUMFZXN0c-wdvXufIETZ26Ch69QAbgqSEsYLJgipUrQ6RrV3IaS75ehtr_wuheRetNxLlHuJsmAybQfRiaNHzrpRbt3kh_TQP8wPb-mCgw</recordid><startdate>20120701</startdate><enddate>20120701</enddate><creator>Siewert, F</creator><creator>Buchheim, J</creator><creator>Höft, T</creator><creator>Fiedler, S</creator><creator>Bourenkov, G</creator><creator>Cianci, M</creator><creator>Signorato, R</creator><general>IOP Publishing</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>F28</scope><scope>FR3</scope></search><sort><creationdate>20120701</creationdate><title>High angular resolution slope measuring deflectometry for the characterization of ultra-precise reflective x-ray optics</title><author>Siewert, F ; Buchheim, J ; Höft, T ; Fiedler, S ; Bourenkov, G ; Cianci, M ; Signorato, R</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c394t-e2eff9ab448329c251e963832688f47653fa1b8d62e1b6d5a48efaafce8d71913</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2012</creationdate><topic>adaptive optics</topic><topic>bimorph mirror</topic><topic>Bimorphs</topic><topic>Deflection</topic><topic>Inspection</topic><topic>Mathematical analysis</topic><topic>metrology</topic><topic>NOM</topic><topic>Optical components</topic><topic>slope error</topic><topic>synchrotron optics</topic><topic>Synchrotron radiation</topic><topic>Synchrotrons</topic><topic>x-ray optics</topic><topic>X-rays</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Siewert, F</creatorcontrib><creatorcontrib>Buchheim, J</creatorcontrib><creatorcontrib>Höft, T</creatorcontrib><creatorcontrib>Fiedler, S</creatorcontrib><creatorcontrib>Bourenkov, G</creatorcontrib><creatorcontrib>Cianci, M</creatorcontrib><creatorcontrib>Signorato, R</creatorcontrib><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><jtitle>Measurement science & technology</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Siewert, F</au><au>Buchheim, J</au><au>Höft, T</au><au>Fiedler, S</au><au>Bourenkov, G</au><au>Cianci, M</au><au>Signorato, R</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>High angular resolution slope measuring deflectometry for the characterization of ultra-precise reflective x-ray optics</atitle><jtitle>Measurement science & technology</jtitle><stitle>MST</stitle><addtitle>Meas. Sci. Technol</addtitle><date>2012-07-01</date><risdate>2012</risdate><volume>23</volume><issue>7</issue><spage>74015</spage><epage>1-8</epage><pages>74015-1-8</pages><issn>0957-0233</issn><eissn>1361-6501</eissn><coden>MSTCEP</coden><abstract>Slope measuring deflectometry has become a standard technique for inspection of ultra-precise reflective optical elements of synchrotron applications. We will report on the inspection of ultra-precise adaptive synchrotron mirrors (bimorph mirrors) to be used under grazing incidence condition. The measurements were performed at the BESSY-II Optics Laboratory of the Helmholtz Zentrum Berlin using the nanometer optical component measuring machine (NOM). Based on the data obtained by the optical measurements, we in this paper simulate the characteristics of the achievable x-ray focus by ray tracing calculations, demonstrated in the case of bimorph mirrors of the EMBL MX1 beamline for macromolecular crystallography at DESY's synchrotron radiation source PETRA III in Hamburg.</abstract><pub>IOP Publishing</pub><doi>10.1088/0957-0233/23/7/074015</doi><tpages>8</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0957-0233 |
| ispartof | Measurement science & technology, 2012-07, Vol.23 (7), p.74015-1-8 |
| issn | 0957-0233 1361-6501 |
| language | eng |
| recordid | cdi_proquest_miscellaneous_1038239005 |
| source | IOP Publishing Journals; Institute of Physics (IOP) Journals - HEAL-Link |
| subjects | adaptive optics bimorph mirror Bimorphs Deflection Inspection Mathematical analysis metrology NOM Optical components slope error synchrotron optics Synchrotron radiation Synchrotrons x-ray optics X-rays |
| title | High angular resolution slope measuring deflectometry for the characterization of ultra-precise reflective x-ray optics |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-07T22%3A45%3A33IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=High%20angular%20resolution%20slope%20measuring%20deflectometry%20for%20the%20characterization%20of%20ultra-precise%20reflective%20x-ray%20optics&rft.jtitle=Measurement%20science%20&%20technology&rft.au=Siewert,%20F&rft.date=2012-07-01&rft.volume=23&rft.issue=7&rft.spage=74015&rft.epage=1-8&rft.pages=74015-1-8&rft.issn=0957-0233&rft.eissn=1361-6501&rft.coden=MSTCEP&rft_id=info:doi/10.1088/0957-0233/23/7/074015&rft_dat=%3Cproquest_cross%3E1038239005%3C/proquest_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=1038239005&rft_id=info:pmid/&rfr_iscdi=true |