Nanoindentation response of zinc titanate thin films deposited by co-sputtering process

► We evaluated the nanoindentation response of zinc titanate films. ► The H, M, Rms, and Ra were altered based on grain growth and recovery. ► The annealing treatment induces weaker bonds and lower resistance at the film. In this study, ZnTiO3 films were grown by radio frequency magnetron co-sputter...

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Veröffentlicht in:	Applied surface science 2012-07, Vol.258 (18), p.6730-6734
Hauptverfasser:	Wu, Shyh-Chi, Jeng, Yeau-Ren, Yau, Wei-Hung, Wu, Kuan-Te, Tsai, Chien-Huang, Chou, Chang-Pin
Format:	Artikel
Sprache:	eng
Schlagworte:	Annealing Atomic force microscopy Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Hardness Modulus of elasticity Nanostructure Physics Radio frequency magnetron co-sputtering Roughness Silicon substrates Thin films Titanates X-ray photoelectron spectroscopy Zinc
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