A review of visible-range Fabry–Perot microspectrometers in silicon for the industry

This review presents microspectrometers in silicon for the industry for measuring light in the visible range, using the Fabry–Perot interferometric technique. The microspectrometers are devices able to do the analysis of the individual spectral components in a given signal and are extensively used o...

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Veröffentlicht in:	Optics and laser technology 2012-10, Vol.44 (7), p.2312-2320
Hauptverfasser:	Carmo, João Paulo, Rocha, Rui Pedro, Bartek, Marian, de Graaf, Ger, Wolffenbuttel, Reinoud F., Correia, José Higino
Format:	Artikel
Sprache:	eng
Schlagworte:	Compensation Devices Electronics Fabry-Perot Gratings (spectra) Industrial applications Integrated silicon microsystem Interferometers Microspectrometer Silicon Spectra
Online-Zugang:	Volltext
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