Multichip Integration on a PLC Platform for 16 × 16 Optical Switch Module Using Passive Alignment Technique

We have integrated eight sets of four-channel semiconductor optical amplifier (SOA) array chips on a silica-based planar lightwave circuit (PLC) platform for 16 times 16 optical switch module by flip-chip bonding technique. To accurately bond eight sets of the arrayed SOA chips on a PLC platform, two methods of two-step assembly and one-step assembly were tried. Among the results of two assembly methods, one-step assembly was estimated to be desirable in respect of the horizontal and vertical bonding accuracy. The bonding accuracy was measured to be within 0.5 mum. Also, we demonstrated 16 times 16 optical switch module.