Stability of CVD-Produced Polymer Thin Films

This research news is presented to help researchers with their development of CVD‐produced polymer thin films, but could also be utilized for thicker coatings and for liquid‐deposited thin films. This arises from the observation that many CVD researchers deposit polymer thin films, and then use them...

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Veröffentlicht in:	Chemical vapor deposition 2011-06, Vol.17 (4-6), p.170-172
1. Verfasser:	Senkevich, Jay J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition Coatings Deposits Extinction coefficient High temperature News Parylene Polymer coating Polymer thin film Polymeric films Stability Thermal stability Thin films
Online-Zugang:	Volltext
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