A Six-Axis MEMS Force-Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution
This paper describes the design of a six-axis microelectromechanical systems (MEMS) force-torque sensor. A movable body is suspended by flexures that allow deflections and rotations along the x -, y -, and z -axes. The orientation of this movable body is sensed by seven capacitors. Transverse sensin...
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| Veröffentlicht in: | Journal of microelectromechanical systems 2009-04, Vol.18 (2), p.433-441 |
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| container_title | Journal of microelectromechanical systems |
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| creator | Beyeler, F. Muntwyler, S. Nelson, B.J. |
| description | This paper describes the design of a six-axis microelectromechanical systems (MEMS) force-torque sensor. A movable body is suspended by flexures that allow deflections and rotations along the x -, y -, and z -axes. The orientation of this movable body is sensed by seven capacitors. Transverse sensing is used for all capacitors, resulting in a high sensitivity. A batch fabrication process is described as capable of fabricating these multiaxis sensors with a high yield. The force sensor is experimentally investigated, and a multiaxis calibration method is described. Measurements show that the resolution is on the order of a micro-Newton and nano-Newtonmeter. This is the first six-axis MEMS force sensor that has been successfully developed. |
| doi_str_mv | 10.1109/JMEMS.2009.2013387 |
| format | Article |
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A movable body is suspended by flexures that allow deflections and rotations along the x -, y -, and z -axes. The orientation of this movable body is sensed by seven capacitors. Transverse sensing is used for all capacitors, resulting in a high sensitivity. A batch fabrication process is described as capable of fabricating these multiaxis sensors with a high yield. The force sensor is experimentally investigated, and a multiaxis calibration method is described. Measurements show that the resolution is on the order of a micro-Newton and nano-Newtonmeter. This is the first six-axis MEMS force sensor that has been successfully developed.</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2009.2013387</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Atomic force microscopy ; Biosensors ; Calibration ; Capacitors ; Exact sciences and technology ; Force feedback ; Force measurement ; Force sensors ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Mechanical instruments, equipment and techniques ; microelectromechanical devices ; Microelectromechanical systems ; Micromechanical devices ; Micromechanical devices and systems ; microsensors ; Multiaxis ; Nanobioscience ; Nanocomposites ; Nanomaterials ; Nanostructure ; Optical microscopy ; Physics ; Sensor phenomena and characterization ; Sensors ; Torque measurement</subject><ispartof>Journal of microelectromechanical systems, 2009-04, Vol.18 (2), p.433-441</ispartof><rights>2009 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2009</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c357t-cb52303d67d4ad3b995fe1541f6cf9754ffd342c94f32b764fc585a79333056d3</citedby><cites>FETCH-LOGICAL-c357t-cb52303d67d4ad3b995fe1541f6cf9754ffd342c94f32b764fc585a79333056d3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4781621$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,796,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4781621$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=21539797$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Beyeler, F.</creatorcontrib><creatorcontrib>Muntwyler, S.</creatorcontrib><creatorcontrib>Nelson, B.J.</creatorcontrib><title>A Six-Axis MEMS Force-Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>This paper describes the design of a six-axis microelectromechanical systems (MEMS) force-torque sensor. A movable body is suspended by flexures that allow deflections and rotations along the x -, y -, and z -axes. The orientation of this movable body is sensed by seven capacitors. Transverse sensing is used for all capacitors, resulting in a high sensitivity. A batch fabrication process is described as capable of fabricating these multiaxis sensors with a high yield. The force sensor is experimentally investigated, and a multiaxis calibration method is described. Measurements show that the resolution is on the order of a micro-Newton and nano-Newtonmeter. This is the first six-axis MEMS force sensor that has been successfully developed.</description><subject>Atomic force microscopy</subject><subject>Biosensors</subject><subject>Calibration</subject><subject>Capacitors</subject><subject>Exact sciences and technology</subject><subject>Force feedback</subject><subject>Force measurement</subject><subject>Force sensors</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Mechanical instruments, equipment and techniques</subject><subject>microelectromechanical devices</subject><subject>Microelectromechanical systems</subject><subject>Micromechanical devices</subject><subject>Micromechanical devices and systems</subject><subject>microsensors</subject><subject>Multiaxis</subject><subject>Nanobioscience</subject><subject>Nanocomposites</subject><subject>Nanomaterials</subject><subject>Nanostructure</subject><subject>Optical microscopy</subject><subject>Physics</subject><subject>Sensor phenomena and characterization</subject><subject>Sensors</subject><subject>Torque measurement</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNpdkMtOAjEUhidGExF9Ad00JiZuBnudTpeEgJcAJgJxOSmdNpYMU2xnIr69RZCFm3PJ-c6fc_4kuUawhxAUDy-T4WTWwxCKGBAhOT9JOkhQlELE8tNYQ8ZTjhg_Ty5CWEGIKM2zTrLog5ndpv2tDWCnAUbOK53Onf9sNZjpOjgP3m3zASZWeZdO9VfjaiDrEkxl_devdaM9eNPBVW1jXX2ZnBlZBX11yN1kMRrOB0_p-PXxedAfp4ow3qRqyTCBpMx4SWVJlkIwoxGjyGTKCM6oMSWhWAlqCF7yjBrFcia5IIRAlpWkm9zvdTfexXtDU6xtULqqZK1dGwoEMRYwyymM6O0_dOVaX8frCoEwyTDNaYTwHoqvhuC1KTberqX_jkrFzuji1-hiZ3RxMDou3R2UZVCyMl7WyobjJkaMCC523M2es1rr45jyHGUYkR_naISy</recordid><startdate>20090401</startdate><enddate>20090401</enddate><creator>Beyeler, F.</creator><creator>Muntwyler, S.</creator><creator>Nelson, B.J.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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A movable body is suspended by flexures that allow deflections and rotations along the x -, y -, and z -axes. The orientation of this movable body is sensed by seven capacitors. Transverse sensing is used for all capacitors, resulting in a high sensitivity. A batch fabrication process is described as capable of fabricating these multiaxis sensors with a high yield. The force sensor is experimentally investigated, and a multiaxis calibration method is described. Measurements show that the resolution is on the order of a micro-Newton and nano-Newtonmeter. This is the first six-axis MEMS force sensor that has been successfully developed.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/JMEMS.2009.2013387</doi><tpages>9</tpages></addata></record> |
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| ispartof | Journal of microelectromechanical systems, 2009-04, Vol.18 (2), p.433-441 |
| issn | 1057-7157 1941-0158 |
| language | eng |
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| source | IEEE Electronic Library (IEL) |
| subjects | Atomic force microscopy Biosensors Calibration Capacitors Exact sciences and technology Force feedback Force measurement Force sensors Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques microelectromechanical devices Microelectromechanical systems Micromechanical devices Micromechanical devices and systems microsensors Multiaxis Nanobioscience Nanocomposites Nanomaterials Nanostructure Optical microscopy Physics Sensor phenomena and characterization Sensors Torque measurement |
| title | A Six-Axis MEMS Force-Torque Sensor With Micro-Newton and Nano-Newtonmeter Resolution |
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