Ductile mode material removal and high-pressure phase transformation in silicon during micro-laser assisted machining

► We scratched Si with 3 conditions (no laser, 10W and 45W) using a novel technique. ► Micro-laser assisted machining preferentially heats only the phase transformed region. ► Optimized laser power (45W) yielded in the deepest cut for similar applied loads. ► Micro Raman spectroscopy is used to stud...

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Veröffentlicht in:	Precision engineering 2012-04, Vol.36 (2), p.364-367
Hauptverfasser:	Ravindra, Deepak, Ghantasala, Muralidhar K., Patten, John
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Ductile mode machining Exact sciences and technology High pressure-temperature phase transformation Lasers Machining Mechanical engineering. Machine design Micro-laser assisted machining Nanocomposites Nanomaterials Nanostructure Phase transformations Precision engineering, watch making Semiconductors Silicon
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