Adhesion and wear studies of magnetron sputtered NbN films

NbN films were deposited on MS, SS and HSS substrates by reactive DC magnetron sputtering. Effects of N2 flow and substrate biasing were studied on the deposition rate, crystal structure, surface hardness, adhesion and tribology. Scratch test was carried out for adhesion evaluation. Online recording...

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Veröffentlicht in:	Tribology international 2012-06, Vol.50, p.16-25
Hauptverfasser:	Singh, Kulwant, Krishnamurthy, N., Suri, A.K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Adhesion Adhesive wear Applied sciences Coating Contact of materials. Friction. Wear Deposition Electric potential Exact sciences and technology Failure Fracture mechanics (crack, fatigue, damage...) Friction Friction, wear, lubrication Fundamental areas of phenomenology (including applications) Machine components Magnetron sputtering Mechanical engineering. Machine design Mechanical properties and methods of testing. Rheology. Fracture mechanics. Tribology Metals. Metallurgy Physics Solid mechanics Structural and continuum mechanics Tribology Wear
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