The effect of the magnetron sputtering gun size on the characteristics of the plasma and CNx film deposition

To investigate the effect of the gun size on plasma and carbon nitride film deposition characteristics in RF magnetron sputtering system, we performed the RF sputtering deposition with different gun sizes and targets (50.8mm and 76.2mm in diameter). The result shows that there are remarkable differe...

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Veröffentlicht in:	Thin solid films 2011-08, Vol.519 (20), p.6649-6653
Hauptverfasser:	ROH, Ki-Min, YOU, Shin-Jae, KIM, Dae-Woong, HAN, Jun-Hee, KIM, Jung-Hyung, SEONG, Dae-Jin
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Deposition Deposition by sputtering Discharge Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures Evolution Exact sciences and technology Fullerenes and related materials diamonds, graphite Magnetron sputtering Materials science Mechanical and acoustical properties Methods of deposition of films and coatings film growth and epitaxy Nanocomposites Nanostructure Physical properties of thin films, nonelectronic Physics Radio frequencies Specific materials Spectra Surface and interface electron states Surface states, band structure, electron density of states Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties)
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