On the optical properties of SLS ELA polycrystalline silicon films

In this work we investigate optical properties of SLS-ELA poly-Si films. UV–visible spectroscopy yielded the film refractive index n and extinction coefficient k. We also employed spectroscopic ellipsometry measurements. All SLS-ELA films showed similar behavior with respect to their optical propert...

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Veröffentlicht in:	Microelectronic engineering 2012-02, Vol.90 (Feb), p.69-71
Hauptverfasser:	Moschou, Despina C., Vourdas, Nikolaos, Davazoglou, Dimitrios, Kouvatsos, Dimitrios N., Vamvakas, Vassilis Emm, Voutsas, Apostolos T.
Format:	Artikel
Sprache:	eng
Schlagworte:	Allo-Si Condensed matter: electronic structure, electrical, magnetic, and optical properties Condensed matter: structure, mechanical and thermal properties Crystal structure Ellipsometry Exact sciences and technology Nanoscale materials: clusters, nanoparticles, nanotubes, and nanocrystals Optical characterization Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity Optical properties Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of bulk materials and thin films Optical properties of low-dimensional, mesoscopic, and nanoscale materials and structures Physics Poly-Si Polysilcon SLS ELA Refractive index Silicon Silicon films Spectra Spectroscopy Structure of solids and liquids crystallography Structure of specific crystalline solids
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Zusammenfassung:	In this work we investigate optical properties of SLS-ELA poly-Si films. UV–visible spectroscopy yielded the film refractive index n and extinction coefficient k. We also employed spectroscopic ellipsometry measurements. All SLS-ELA films showed similar behavior with respect to their optical properties, however very different from a-Si and c-Si. The XRD spectra acquired exhibited a prevailing peak angle at around 21.5°, which, according to literature, corresponds to a Si modification named allo-Si. The above indicate that possibly SLS-ELA Si films have a crystallographic structure similar to allo-Si.
ISSN:	0167-9317 1873-5568
DOI:	10.1016/j.mee.2011.04.032