Miniaturized flowthrough microdispenser with piezoceramic tripod actuation
In this paper, the further development of a silicon flowthrough microdispenser is described. Previously reported designs of the dispenser used bimorph, and later multilayered, piezoelectric actuator elements for the generation of droplets. The introduction of a multilayered actuator significantly re...
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| Veröffentlicht in: | Journal of microelectromechanical systems 2005-02, Vol.14 (1), p.134-140 |
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| creator | Bergkvist, J. Lilliehorn, T. Nilsson, J. Johansson, S. Laurell, T. |
| description | In this paper, the further development of a silicon flowthrough microdispenser is described. Previously reported designs of the dispenser used bimorph, and later multilayered, piezoelectric actuator elements for the generation of droplets. The introduction of a multilayered actuator significantly reduced the voltage amplitude needed to dispense droplets. Dispenser properties relevant for chemical analysis systems, e.g., reduced sample volume, internal surface area, and dispersion, were improved by miniaturization of the device. A new actuator design, the tripod, is presented to enable further dispenser miniaturization and to facilitate device assembly. Tripod actuators were manufactured using a prototyping process, based on micromilling, for multilayer piezoceramic components. A building technique for miniaturized electrical interconnects, based on microstructured flexible printed circuits, is also suggested in line with the prospect of future miniaturization. The microfluidic properties of the tripod-actuated dispenser were evaluated. Stable droplet generation in the frequency range from 0 to 3 kHz was demonstrated, providing a maximum dispensed flow rate of 7.8 /spl mu/L/min. |
| doi_str_mv | 10.1109/JMEMS.2004.839000 |
| format | Article |
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Previously reported designs of the dispenser used bimorph, and later multilayered, piezoelectric actuator elements for the generation of droplets. The introduction of a multilayered actuator significantly reduced the voltage amplitude needed to dispense droplets. Dispenser properties relevant for chemical analysis systems, e.g., reduced sample volume, internal surface area, and dispersion, were improved by miniaturization of the device. A new actuator design, the tripod, is presented to enable further dispenser miniaturization and to facilitate device assembly. Tripod actuators were manufactured using a prototyping process, based on micromilling, for multilayer piezoceramic components. A building technique for miniaturized electrical interconnects, based on microstructured flexible printed circuits, is also suggested in line with the prospect of future miniaturization. The microfluidic properties of the tripod-actuated dispenser were evaluated. Stable droplet generation in the frequency range from 0 to 3 kHz was demonstrated, providing a maximum dispensed flow rate of 7.8 /spl mu/L/min.</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2004.839000</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Actuator design ; Actuators ; Applied fluid mechanics ; Assembly ; Chemical analysis ; Chemical elements ; Devices ; Dispenser ; Dispensers ; droplet ; Droplets ; Engineering and Technology ; Exact sciences and technology ; Fluid dynamics ; Fluidics ; Fundamental areas of phenomenology (including applications) ; General equipment and techniques ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; lead zirconate ; lead zirconate titanate (PZT) ; Manufacturing processes ; Mechanical instruments, equipment and techniques ; Medical Engineering ; Medicinteknik ; Micromechanical devices and systems ; Miniaturization ; Nonhomogeneous media ; Physics ; piezoactuator ; Piezoelectric actuators ; Piezoelectric ceramics ; Piezoelectric materials ; Prototypes ; Silicon ; Teknik ; titanate (PZT) ; Transducers ; Tripods ; Voltage</subject><ispartof>Journal of microelectromechanical systems, 2005-02, Vol.14 (1), p.134-140</ispartof><rights>2005 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2005</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c455t-17f8282ef122d7e46036e105d0070f6c2b0d9438b1cf1ab024a66f697f8d3b133</citedby><cites>FETCH-LOGICAL-c455t-17f8282ef122d7e46036e105d0070f6c2b0d9438b1cf1ab024a66f697f8d3b133</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/1390944$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>230,314,780,784,796,885,27924,27925,54758</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/1390944$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=16517560$$DView record in Pascal Francis$$Hfree_for_read</backlink><backlink>$$Uhttps://lup.lub.lu.se/record/254318$$DView record from Swedish Publication Index$$Hfree_for_read</backlink></links><search><creatorcontrib>Bergkvist, J.</creatorcontrib><creatorcontrib>Lilliehorn, T.</creatorcontrib><creatorcontrib>Nilsson, J.</creatorcontrib><creatorcontrib>Johansson, S.</creatorcontrib><creatorcontrib>Laurell, T.</creatorcontrib><title>Miniaturized flowthrough microdispenser with piezoceramic tripod actuation</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>In this paper, the further development of a silicon flowthrough microdispenser is described. Previously reported designs of the dispenser used bimorph, and later multilayered, piezoelectric actuator elements for the generation of droplets. The introduction of a multilayered actuator significantly reduced the voltage amplitude needed to dispense droplets. Dispenser properties relevant for chemical analysis systems, e.g., reduced sample volume, internal surface area, and dispersion, were improved by miniaturization of the device. A new actuator design, the tripod, is presented to enable further dispenser miniaturization and to facilitate device assembly. Tripod actuators were manufactured using a prototyping process, based on micromilling, for multilayer piezoceramic components. A building technique for miniaturized electrical interconnects, based on microstructured flexible printed circuits, is also suggested in line with the prospect of future miniaturization. The microfluidic properties of the tripod-actuated dispenser were evaluated. Stable droplet generation in the frequency range from 0 to 3 kHz was demonstrated, providing a maximum dispensed flow rate of 7.8 /spl mu/L/min.</description><subject>Actuator design</subject><subject>Actuators</subject><subject>Applied fluid mechanics</subject><subject>Assembly</subject><subject>Chemical analysis</subject><subject>Chemical elements</subject><subject>Devices</subject><subject>Dispenser</subject><subject>Dispensers</subject><subject>droplet</subject><subject>Droplets</subject><subject>Engineering and Technology</subject><subject>Exact sciences and technology</subject><subject>Fluid dynamics</subject><subject>Fluidics</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>General equipment and techniques</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>lead zirconate</subject><subject>lead zirconate titanate (PZT)</subject><subject>Manufacturing processes</subject><subject>Mechanical instruments, equipment and techniques</subject><subject>Medical Engineering</subject><subject>Medicinteknik</subject><subject>Micromechanical devices and systems</subject><subject>Miniaturization</subject><subject>Nonhomogeneous media</subject><subject>Physics</subject><subject>piezoactuator</subject><subject>Piezoelectric actuators</subject><subject>Piezoelectric ceramics</subject><subject>Piezoelectric materials</subject><subject>Prototypes</subject><subject>Silicon</subject><subject>Teknik</subject><subject>titanate (PZT)</subject><subject>Transducers</subject><subject>Tripods</subject><subject>Voltage</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNp9kU9v1DAQxSMEEqXwARCXCAnEJcuM_8ZHVBVKtSsOwNmyHYd1lY2DnWjVfnq8pGolDhxGM9L83pM9r6peI2wQQX283l3uvm8IANu0VAHAk-oMFcMGkLdPywxcNhK5fF69yPkGABlrxVl1vQtjMPOSwp3v6n6Ix3mf4vJrXx-CS7ELefJj9qk-hnlfT8HfReeTKct6TmGKXW3cvJg5xPFl9aw3Q_av7vt59fPz5Y-Lq2b77cvXi0_bxjHO5wZl35KW-B4J6aRnAqjw5XkdgIReOGKhU4y2Fl2PxgJhRoheqCLrqEVKz6vt6puPflqsnlI4mHSrowl6WKZStpTOXnOOFNAKbQUozZxsddsRobnlwgJDa2lX7N6vdlOKvxefZ30I2flhMKOPS9akBcKBYAE__BdEQCU4o0oW9O0_6E1c0liuohUBzpngqkC4QuXOOSffP_wEQZ9C1X9D1adQ9Rpq0by7NzbZmaFPZnQhPwoFR8nFiXuzcsF7_7guJoox-gcxO6l0</recordid><startdate>20050201</startdate><enddate>20050201</enddate><creator>Bergkvist, J.</creator><creator>Lilliehorn, T.</creator><creator>Nilsson, J.</creator><creator>Johansson, S.</creator><creator>Laurell, T.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope><scope>F28</scope><scope>ADTPV</scope><scope>AOWAS</scope><scope>D95</scope></search><sort><creationdate>20050201</creationdate><title>Miniaturized flowthrough microdispenser with piezoceramic tripod actuation</title><author>Bergkvist, J. ; Lilliehorn, T. ; Nilsson, J. ; Johansson, S. ; Laurell, T.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c455t-17f8282ef122d7e46036e105d0070f6c2b0d9438b1cf1ab024a66f697f8d3b133</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><topic>Actuator design</topic><topic>Actuators</topic><topic>Applied fluid mechanics</topic><topic>Assembly</topic><topic>Chemical analysis</topic><topic>Chemical elements</topic><topic>Devices</topic><topic>Dispenser</topic><topic>Dispensers</topic><topic>droplet</topic><topic>Droplets</topic><topic>Engineering and Technology</topic><topic>Exact sciences and technology</topic><topic>Fluid dynamics</topic><topic>Fluidics</topic><topic>Fundamental areas of phenomenology (including applications)</topic><topic>General equipment and techniques</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>lead zirconate</topic><topic>lead zirconate titanate (PZT)</topic><topic>Manufacturing processes</topic><topic>Mechanical instruments, equipment and techniques</topic><topic>Medical Engineering</topic><topic>Medicinteknik</topic><topic>Micromechanical devices and systems</topic><topic>Miniaturization</topic><topic>Nonhomogeneous media</topic><topic>Physics</topic><topic>piezoactuator</topic><topic>Piezoelectric actuators</topic><topic>Piezoelectric ceramics</topic><topic>Piezoelectric materials</topic><topic>Prototypes</topic><topic>Silicon</topic><topic>Teknik</topic><topic>titanate (PZT)</topic><topic>Transducers</topic><topic>Tripods</topic><topic>Voltage</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Bergkvist, J.</creatorcontrib><creatorcontrib>Lilliehorn, T.</creatorcontrib><creatorcontrib>Nilsson, J.</creatorcontrib><creatorcontrib>Johansson, S.</creatorcontrib><creatorcontrib>Laurell, T.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>SwePub</collection><collection>SwePub Articles</collection><collection>SWEPUB Lunds universitet</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Bergkvist, J.</au><au>Lilliehorn, T.</au><au>Nilsson, J.</au><au>Johansson, S.</au><au>Laurell, T.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Miniaturized flowthrough microdispenser with piezoceramic tripod actuation</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2005-02-01</date><risdate>2005</risdate><volume>14</volume><issue>1</issue><spage>134</spage><epage>140</epage><pages>134-140</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>In this paper, the further development of a silicon flowthrough microdispenser is described. Previously reported designs of the dispenser used bimorph, and later multilayered, piezoelectric actuator elements for the generation of droplets. The introduction of a multilayered actuator significantly reduced the voltage amplitude needed to dispense droplets. Dispenser properties relevant for chemical analysis systems, e.g., reduced sample volume, internal surface area, and dispersion, were improved by miniaturization of the device. A new actuator design, the tripod, is presented to enable further dispenser miniaturization and to facilitate device assembly. Tripod actuators were manufactured using a prototyping process, based on micromilling, for multilayer piezoceramic components. A building technique for miniaturized electrical interconnects, based on microstructured flexible printed circuits, is also suggested in line with the prospect of future miniaturization. The microfluidic properties of the tripod-actuated dispenser were evaluated. Stable droplet generation in the frequency range from 0 to 3 kHz was demonstrated, providing a maximum dispensed flow rate of 7.8 /spl mu/L/min.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/JMEMS.2004.839000</doi><tpages>7</tpages></addata></record> |
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| subjects | Actuator design Actuators Applied fluid mechanics Assembly Chemical analysis Chemical elements Devices Dispenser Dispensers droplet Droplets Engineering and Technology Exact sciences and technology Fluid dynamics Fluidics Fundamental areas of phenomenology (including applications) General equipment and techniques Instruments, apparatus, components and techniques common to several branches of physics and astronomy lead zirconate lead zirconate titanate (PZT) Manufacturing processes Mechanical instruments, equipment and techniques Medical Engineering Medicinteknik Micromechanical devices and systems Miniaturization Nonhomogeneous media Physics piezoactuator Piezoelectric actuators Piezoelectric ceramics Piezoelectric materials Prototypes Silicon Teknik titanate (PZT) Transducers Tripods Voltage |
| title | Miniaturized flowthrough microdispenser with piezoceramic tripod actuation |
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