Structural and physical properties of highly piezoresistive nickel containing hydrogenated carbon thin films

Nickel containing amorphous hydrogenated carbon (Ni:a-C:H) thin films prepared by reactive sputtering have a high potential for use as piezoresistive sensors. Investigations by means of X-ray diffraction (XRD), transmission electron microscopy, energy-dispersive X-ray spectroscopy, and magnetic char...

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Veröffentlicht in:	Diamond and related materials 2012-05, Vol.25, p.50-58
Hauptverfasser:	Koppert, Ralf, Uhlig, Steffen, Schmid-Engel, Hanna, Göttel, Dirk, Probst, Anne-Catherine, Schultes, Günter, Werner, Ulf
Format:	Artikel
Sprache:	eng
Schlagworte:	Carbon Composition and phase identification Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Deposition by sputtering Exact sciences and technology Fullerenes and related materials diamonds, graphite Graphite-like carbon High gauge factor Materials science Methods of deposition of films and coatings film growth and epitaxy NanoNi@C Ni:a-C:H Nickel Nickel carbon nanocomposite Physical properties Physics Piezoresistance Pressure sensor Pressure sensors Specific materials Sputtering Strain gages Strain gauge Strain sensitivity Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology Thin films X-rays
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