Soft magnetic and microwave characteristics of amorphous FeCoBNi-Al2O3 films deposited by RF magnetron co-sputtering

A series of FeCoBNi-Al2O3 films were fabricated on glass and polymer substrates by means of RF magnetron co-sputtering. Firstly, the FeCoB films with Al2O3 addition were investigated. To further improve the microwave characteristics of the films, the effects of the Ni content on the soft magnetic pr...

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Veröffentlicht in:Journal of alloys and compounds 2012-02, Vol.514, p.170-173
Hauptverfasser: Xiong, Xuan, Feng, Zekun, Ren, Wenyi, Lin, Huan, Yan, Shuoqing
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Sprache:eng
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