An Overview of Electrospray Applications in MEMS and Microfluidic Systems
Integrating electrospray into microelectromechanical systems (MEMS) and microfluidic systems supports applications in diverse fields from biotechnology to aerospace. Electrospray also functions as a production tool, allowing for novel methods of MEMS fabrication. This review covers the three most si...
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| Veröffentlicht in: | Journal of microelectromechanical systems 2011-12, Vol.20 (6), p.1241-1249 |
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| container_title | Journal of microelectromechanical systems |
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| creator | Chiarot, P. R. Sullivan, P. Ben Mrad, R. |
| description | Integrating electrospray into microelectromechanical systems (MEMS) and microfluidic systems supports applications in diverse fields from biotechnology to aerospace. Electrospray also functions as a production tool, allowing for novel methods of MEMS fabrication. This review covers the three most significant applications of electrospray in MEMS and microfluidic systems technology: 1) as an integral part of a microfluidic device, most notably electrospray emitters for coupling a microfluidic chip to a mass spectrometer; 2) as a method for fabricating and manufacturing MEMS; and 3) for micropropulsion in aerospace applications using MEMS-based emitters. Perspectives on future research directions and opportunities are provided. |
| doi_str_mv | 10.1109/JMEMS.2011.2168810 |
| format | Article |
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R.</au><au>Sullivan, P.</au><au>Ben Mrad, R.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>An Overview of Electrospray Applications in MEMS and Microfluidic Systems</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2011-12-01</date><risdate>2011</risdate><volume>20</volume><issue>6</issue><spage>1241</spage><epage>1249</epage><pages>1241-1249</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>Integrating electrospray into microelectromechanical systems (MEMS) and microfluidic systems supports applications in diverse fields from biotechnology to aerospace. Electrospray also functions as a production tool, allowing for novel methods of MEMS fabrication. 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| ispartof | Journal of microelectromechanical systems, 2011-12, Vol.20 (6), p.1241-1249 |
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| source | IEEE Electronic Library (IEL) |
| subjects | Aerospace Aircraft components Applied fluid mechanics Biomedical engineering Biotechnology Electrohydrodynamics electrospray Emitters Exact sciences and technology Fluid dynamics Fluidics Fundamental areas of phenomenology (including applications) Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mass spectrometers Mechanical instruments, equipment and techniques Microelectromechanical systems microelectromechanical systems (MEMS) Microfluidics Micromechanical devices and systems Physics Polymers Production methods Substrates |
| title | An Overview of Electrospray Applications in MEMS and Microfluidic Systems |
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