Chemical and optical characterisation of atomic layer deposition aluminium doped ZnO films for photovoltaics by glow discharge optical emission spectrometry

Aluminium doped ZnO (AZO) alloy films produced by atomic layer deposition (ALD) are analysed by glow discharge optical emission spectrometry (GD-OES). A measurement procedure is established, to determine simultaneously thickness, mean chemical composition and refractive index of homogeneous films us...

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Veröffentlicht in:	Journal of analytical atomic spectrometry 2011-01, Vol.26 (4), p.822-827
Hauptverfasser:	Schmitt, S. W., Gamez, G., Sivakov, V., Schubert, M., Christiansen, S. H., Michler, J.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Azo Deposition Glow discharges Solar cells Spectrometry Spectroscopy Zinc oxide
Online-Zugang:	Volltext
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