Effect of Ga doping on micro/structural, electrical and optical properties of pulsed laser deposited ZnO thin films
Undoped and Ga doped ZnO thin films (1% GZO, 3% GZO and 5% GZO) were grown on c-Al 2O 3 substrates using the 1, 3 and 5 at. wt.% Ga doped ZnO targets by pulsed laser deposition. X-ray diffraction studies revealed that highly c-axis oriented, single phase, undoped and Ga doped ZnO thin films with wur...
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Veröffentlicht in: | Thin solid films 2011-12, Vol.520 (4), p.1212-1217 |
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Sprache: | eng |
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