The use of arc-erosion as a patterning technique for transparent conductive materials

Within the framework of cost-effective patterning processes a novel technique that saves photolithographic processing steps, easily scalable to wide area production, is proposed. It consists of a tip-probe, which is biased with respect to a conductive substrate and slides on it, keeping contact with...

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Veröffentlicht in:	Thin solid films 2011-12, Vol.520 (4), p.1318-1322
Hauptverfasser:	Jiménez-Trillo, J., Alvarez, A.L., Coya, C., Céspedes, E., Espinosa, A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Ablation Aluminum Applied sciences Arc Chromium Cost-effective patterning Cross-disciplinary physics: materials science rheology Electronics Erosion Exact sciences and technology Indium tin oxide ITO Leaves Materials science Microelectronic fabrication (materials and surfaces technology) Patterning Physics Polyethylenes Proposals Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Surface treatments Transparent conductive materials
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