High quality amorphous indium zinc oxide thin films synthesized by pulsed laser deposition

Indium zinc oxide films were grown from targets with two different In atomic concentration [In/(In + Zn)] of 40% and 80% by the pulsed laser deposition technique on glass substrates from room temperature up to 100 °C. X-ray diffraction and reflectometry investigations showed that films were amorphou...

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Veröffentlicht in:Thin solid films 2011-12, Vol.520 (4), p.1274-1277
Hauptverfasser: Socol, G., Craciun, D., Mihailescu, I.N., Stefan, N., Besleaga, C., Ion, L., Antohe, S., Kim, K.W., Norton, D., Pearton, S.J., Galca, A.C., Craciun, V.
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Sprache:eng
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