High quality amorphous indium zinc oxide thin films synthesized by pulsed laser deposition
Indium zinc oxide films were grown from targets with two different In atomic concentration [In/(In + Zn)] of 40% and 80% by the pulsed laser deposition technique on glass substrates from room temperature up to 100 °C. X-ray diffraction and reflectometry investigations showed that films were amorphou...
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Veröffentlicht in: | Thin solid films 2011-12, Vol.520 (4), p.1274-1277 |
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Hauptverfasser: | , , , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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