Correlation between anionic substitution and structural properties in AlCr(O xN 1−x) coatings deposited by lateral rotating cathode arc PVD

The influence of oxygen content on the properties of cathodic arc-deposited AlCr(O xN 1−x) coatings has been studied. All samples were prepared in a nitrogen-rich mixture of N 2 and O 2 at 550 °C using lateral rotating arc cathodes (LARC) technology together with a pulsed bias voltage. The obtained...

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Veröffentlicht in:	Thin solid films 2011-12, Vol.520 (5), p.1597-1602
Hauptverfasser:	Najafi, H., Karimi, A., Dessarzin, P., Morstein, M.
Format:	Artikel
Sprache:	eng
Schlagworte:	Alumina Coatings Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Deposition by sputtering Exact sciences and technology Face centered cubic lattice Hardness Lattices Materials science Mechanical and acoustical properties Methods of deposition of films and coatings film growth and epitaxy Oxygen content Oxynitride Oxynitrides Physical properties of thin films, nonelectronic Physics Pin-on-disk test Rotating Rotating arc cathodes Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) TEM Thin film structure and morphology Transmission electron microscopy α-(Al,Cr) 2O 3
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