Correlation between anionic substitution and structural properties in AlCr(O xN 1−x) coatings deposited by lateral rotating cathode arc PVD
The influence of oxygen content on the properties of cathodic arc-deposited AlCr(O xN 1−x) coatings has been studied. All samples were prepared in a nitrogen-rich mixture of N 2 and O 2 at 550 °C using lateral rotating arc cathodes (LARC) technology together with a pulsed bias voltage. The obtained...
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| description | The influence of oxygen content on the properties of cathodic arc-deposited AlCr(O
xN
1−x) coatings has been studied. All samples were prepared in a nitrogen-rich mixture of N
2 and O
2 at 550
°C using lateral rotating arc cathodes (LARC) technology together with a pulsed bias voltage. The obtained coatings were characterized by various techniques including XRD, EPMA, TEM, pin-on-disk wear tests and nanoindentation. The results obtained allow to classify the coatings into three groups with respect to their microstructure, mechanical properties and oxygen content, x. For the first group of samples with x
≤
0.6, single-phase films of (Al,Cr)O
xN
1-x with
fcc lattice were obtained, with well-developed columnar structure and a hardness of 30 to 33
GPa. In the second group, a diffuse columnar structure was observed while the
fcc lattice was still present despite the large proportion of oxygen, 0.6
<
x
≤
0.97, and the observed hardness decreased to 25
GPa. No amorphous phase was detected in this group as confirmed by TEM. The simulation of XRD patterns of nitride lattices with oxygen incorporation allowed to suggest the formation of cation vacancies in the structure of the investigated oxynitride coatings. The third group is formed by coatings with x
>
0.97, where a well-crystalline α-(Al,Cr)
2O
3 corundum phase was observed and the hardness increased again to 28
GPa. Our results indicate that the second group of coatings is metastable and after heat treatment transforms to a composite of cubic oxynitride and corundum oxide. Both friction and wear of samples from the entire investigated compositional range were studied at room temperature and 600
°C. The low wear rates observed for the oxynitride coatings underline their potential for use in turning and milling applications. |
| doi_str_mv | 10.1016/j.tsf.2011.08.075 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_1010872253</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><els_id>S0040609011015793</els_id><sourcerecordid>1010872253</sourcerecordid><originalsourceid>FETCH-LOGICAL-c360t-a5629a70c57bb95f052006f1a5b20c535c650e7b08882b98a69ba6d51042419b3</originalsourceid><addsrcrecordid>eNp9kL9uFDEQxi1EJI6EB6BzgxSKXcbes9crqujCPylKKIDWsr2z4NPGPmwvJG9AQ8Mj8iT4chFlqtHM_L5vNB8hzxm0DJh8tW1LnloOjLWgWujFI7Jiqh8a3nfsMVkBrKGRMMAT8jTnLQAwzrsV-b2JKeFsio-BWiw_EQM1oXbe0bzYXHxZ7pYmjDSXtLiyJDPTXYo7TMVjpj7Qs3mTTq_ozSVlf3_9uXlJXayW4WumI-5i9gVHam9pvYN7cYrlbk2dKd_iiNQkRz9-OT8hR5OZMz67r8fk89s3nzbvm4urdx82ZxeN6ySUxgjJB9ODE721g5hAcAA5MSMsr8NOOCkAewtKKW4HZeRgjRwFgzVfs8F2x-T04Fu_-L5gLvraZ4fzbALGJesaKaiec9FVlB1Ql2LOCSe9S_7apNsK7Tmpt7pGr_fRa1C6Rl81L-7tTXZmnpIJzuf_Qi6UkIxD5V4fOKy__vCYdHYeg8PRJ3RFj9E_cOUfegibEg</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1010872253</pqid></control><display><type>article</type><title>Correlation between anionic substitution and structural properties in AlCr(O xN 1−x) coatings deposited by lateral rotating cathode arc PVD</title><source>ScienceDirect Journals (5 years ago - present)</source><creator>Najafi, H. ; Karimi, A. ; Dessarzin, P. ; Morstein, M.</creator><creatorcontrib>Najafi, H. ; Karimi, A. ; Dessarzin, P. ; Morstein, M.</creatorcontrib><description>The influence of oxygen content on the properties of cathodic arc-deposited AlCr(O
xN
1−x) coatings has been studied. All samples were prepared in a nitrogen-rich mixture of N
2 and O
2 at 550
°C using lateral rotating arc cathodes (LARC) technology together with a pulsed bias voltage. The obtained coatings were characterized by various techniques including XRD, EPMA, TEM, pin-on-disk wear tests and nanoindentation. The results obtained allow to classify the coatings into three groups with respect to their microstructure, mechanical properties and oxygen content, x. For the first group of samples with x
≤
0.6, single-phase films of (Al,Cr)O
xN
1-x with
fcc lattice were obtained, with well-developed columnar structure and a hardness of 30 to 33
GPa. In the second group, a diffuse columnar structure was observed while the
fcc lattice was still present despite the large proportion of oxygen, 0.6
<
x
≤
0.97, and the observed hardness decreased to 25
GPa. No amorphous phase was detected in this group as confirmed by TEM. The simulation of XRD patterns of nitride lattices with oxygen incorporation allowed to suggest the formation of cation vacancies in the structure of the investigated oxynitride coatings. The third group is formed by coatings with x
>
0.97, where a well-crystalline α-(Al,Cr)
2O
3 corundum phase was observed and the hardness increased again to 28
GPa. Our results indicate that the second group of coatings is metastable and after heat treatment transforms to a composite of cubic oxynitride and corundum oxide. Both friction and wear of samples from the entire investigated compositional range were studied at room temperature and 600
°C. The low wear rates observed for the oxynitride coatings underline their potential for use in turning and milling applications.</description><identifier>ISSN: 0040-6090</identifier><identifier>EISSN: 1879-2731</identifier><identifier>DOI: 10.1016/j.tsf.2011.08.075</identifier><identifier>CODEN: THSFAP</identifier><language>eng</language><publisher>Amsterdam: Elsevier B.V</publisher><subject>Alumina ; Coatings ; Condensed matter: structure, mechanical and thermal properties ; Cross-disciplinary physics: materials science; rheology ; Deposition by sputtering ; Exact sciences and technology ; Face centered cubic lattice ; Hardness ; Lattices ; Materials science ; Mechanical and acoustical properties ; Methods of deposition of films and coatings; film growth and epitaxy ; Oxygen content ; Oxynitride ; Oxynitrides ; Physical properties of thin films, nonelectronic ; Physics ; Pin-on-disk test ; Rotating ; Rotating arc cathodes ; Structure and morphology; thickness ; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) ; TEM ; Thin film structure and morphology ; Transmission electron microscopy ; α-(Al,Cr) 2O 3</subject><ispartof>Thin solid films, 2011-12, Vol.520 (5), p.1597-1602</ispartof><rights>2011 Elsevier B.V.</rights><rights>2015 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c360t-a5629a70c57bb95f052006f1a5b20c535c650e7b08882b98a69ba6d51042419b3</citedby><cites>FETCH-LOGICAL-c360t-a5629a70c57bb95f052006f1a5b20c535c650e7b08882b98a69ba6d51042419b3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://dx.doi.org/10.1016/j.tsf.2011.08.075$$EHTML$$P50$$Gelsevier$$H</linktohtml><link.rule.ids>309,310,314,780,784,789,790,3548,23929,23930,25139,27923,27924,45994</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=25856120$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Najafi, H.</creatorcontrib><creatorcontrib>Karimi, A.</creatorcontrib><creatorcontrib>Dessarzin, P.</creatorcontrib><creatorcontrib>Morstein, M.</creatorcontrib><title>Correlation between anionic substitution and structural properties in AlCr(O xN 1−x) coatings deposited by lateral rotating cathode arc PVD</title><title>Thin solid films</title><description>The influence of oxygen content on the properties of cathodic arc-deposited AlCr(O
xN
1−x) coatings has been studied. All samples were prepared in a nitrogen-rich mixture of N
2 and O
2 at 550
°C using lateral rotating arc cathodes (LARC) technology together with a pulsed bias voltage. The obtained coatings were characterized by various techniques including XRD, EPMA, TEM, pin-on-disk wear tests and nanoindentation. The results obtained allow to classify the coatings into three groups with respect to their microstructure, mechanical properties and oxygen content, x. For the first group of samples with x
≤
0.6, single-phase films of (Al,Cr)O
xN
1-x with
fcc lattice were obtained, with well-developed columnar structure and a hardness of 30 to 33
GPa. In the second group, a diffuse columnar structure was observed while the
fcc lattice was still present despite the large proportion of oxygen, 0.6
<
x
≤
0.97, and the observed hardness decreased to 25
GPa. No amorphous phase was detected in this group as confirmed by TEM. The simulation of XRD patterns of nitride lattices with oxygen incorporation allowed to suggest the formation of cation vacancies in the structure of the investigated oxynitride coatings. The third group is formed by coatings with x
>
0.97, where a well-crystalline α-(Al,Cr)
2O
3 corundum phase was observed and the hardness increased again to 28
GPa. Our results indicate that the second group of coatings is metastable and after heat treatment transforms to a composite of cubic oxynitride and corundum oxide. Both friction and wear of samples from the entire investigated compositional range were studied at room temperature and 600
°C. The low wear rates observed for the oxynitride coatings underline their potential for use in turning and milling applications.</description><subject>Alumina</subject><subject>Coatings</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Deposition by sputtering</subject><subject>Exact sciences and technology</subject><subject>Face centered cubic lattice</subject><subject>Hardness</subject><subject>Lattices</subject><subject>Materials science</subject><subject>Mechanical and acoustical properties</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Oxygen content</subject><subject>Oxynitride</subject><subject>Oxynitrides</subject><subject>Physical properties of thin films, nonelectronic</subject><subject>Physics</subject><subject>Pin-on-disk test</subject><subject>Rotating</subject><subject>Rotating arc cathodes</subject><subject>Structure and morphology; thickness</subject><subject>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</subject><subject>TEM</subject><subject>Thin film structure and morphology</subject><subject>Transmission electron microscopy</subject><subject>α-(Al,Cr) 2O 3</subject><issn>0040-6090</issn><issn>1879-2731</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><recordid>eNp9kL9uFDEQxi1EJI6EB6BzgxSKXcbes9crqujCPylKKIDWsr2z4NPGPmwvJG9AQ8Mj8iT4chFlqtHM_L5vNB8hzxm0DJh8tW1LnloOjLWgWujFI7Jiqh8a3nfsMVkBrKGRMMAT8jTnLQAwzrsV-b2JKeFsio-BWiw_EQM1oXbe0bzYXHxZ7pYmjDSXtLiyJDPTXYo7TMVjpj7Qs3mTTq_ozSVlf3_9uXlJXayW4WumI-5i9gVHam9pvYN7cYrlbk2dKd_iiNQkRz9-OT8hR5OZMz67r8fk89s3nzbvm4urdx82ZxeN6ySUxgjJB9ODE721g5hAcAA5MSMsr8NOOCkAewtKKW4HZeRgjRwFgzVfs8F2x-T04Fu_-L5gLvraZ4fzbALGJesaKaiec9FVlB1Ql2LOCSe9S_7apNsK7Tmpt7pGr_fRa1C6Rl81L-7tTXZmnpIJzuf_Qi6UkIxD5V4fOKy__vCYdHYeg8PRJ3RFj9E_cOUfegibEg</recordid><startdate>20111230</startdate><enddate>20111230</enddate><creator>Najafi, H.</creator><creator>Karimi, A.</creator><creator>Dessarzin, P.</creator><creator>Morstein, M.</creator><general>Elsevier B.V</general><general>Elsevier</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QF</scope><scope>7SR</scope><scope>7U5</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20111230</creationdate><title>Correlation between anionic substitution and structural properties in AlCr(O xN 1−x) coatings deposited by lateral rotating cathode arc PVD</title><author>Najafi, H. ; Karimi, A. ; Dessarzin, P. ; Morstein, M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c360t-a5629a70c57bb95f052006f1a5b20c535c650e7b08882b98a69ba6d51042419b3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Alumina</topic><topic>Coatings</topic><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Deposition by sputtering</topic><topic>Exact sciences and technology</topic><topic>Face centered cubic lattice</topic><topic>Hardness</topic><topic>Lattices</topic><topic>Materials science</topic><topic>Mechanical and acoustical properties</topic><topic>Methods of deposition of films and coatings; film growth and epitaxy</topic><topic>Oxygen content</topic><topic>Oxynitride</topic><topic>Oxynitrides</topic><topic>Physical properties of thin films, nonelectronic</topic><topic>Physics</topic><topic>Pin-on-disk test</topic><topic>Rotating</topic><topic>Rotating arc cathodes</topic><topic>Structure and morphology; thickness</topic><topic>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</topic><topic>TEM</topic><topic>Thin film structure and morphology</topic><topic>Transmission electron microscopy</topic><topic>α-(Al,Cr) 2O 3</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Najafi, H.</creatorcontrib><creatorcontrib>Karimi, A.</creatorcontrib><creatorcontrib>Dessarzin, P.</creatorcontrib><creatorcontrib>Morstein, M.</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Aluminium Industry Abstracts</collection><collection>Engineered Materials Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Thin solid films</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Najafi, H.</au><au>Karimi, A.</au><au>Dessarzin, P.</au><au>Morstein, M.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Correlation between anionic substitution and structural properties in AlCr(O xN 1−x) coatings deposited by lateral rotating cathode arc PVD</atitle><jtitle>Thin solid films</jtitle><date>2011-12-30</date><risdate>2011</risdate><volume>520</volume><issue>5</issue><spage>1597</spage><epage>1602</epage><pages>1597-1602</pages><issn>0040-6090</issn><eissn>1879-2731</eissn><coden>THSFAP</coden><abstract>The influence of oxygen content on the properties of cathodic arc-deposited AlCr(O
xN
1−x) coatings has been studied. All samples were prepared in a nitrogen-rich mixture of N
2 and O
2 at 550
°C using lateral rotating arc cathodes (LARC) technology together with a pulsed bias voltage. The obtained coatings were characterized by various techniques including XRD, EPMA, TEM, pin-on-disk wear tests and nanoindentation. The results obtained allow to classify the coatings into three groups with respect to their microstructure, mechanical properties and oxygen content, x. For the first group of samples with x
≤
0.6, single-phase films of (Al,Cr)O
xN
1-x with
fcc lattice were obtained, with well-developed columnar structure and a hardness of 30 to 33
GPa. In the second group, a diffuse columnar structure was observed while the
fcc lattice was still present despite the large proportion of oxygen, 0.6
<
x
≤
0.97, and the observed hardness decreased to 25
GPa. No amorphous phase was detected in this group as confirmed by TEM. The simulation of XRD patterns of nitride lattices with oxygen incorporation allowed to suggest the formation of cation vacancies in the structure of the investigated oxynitride coatings. The third group is formed by coatings with x
>
0.97, where a well-crystalline α-(Al,Cr)
2O
3 corundum phase was observed and the hardness increased again to 28
GPa. Our results indicate that the second group of coatings is metastable and after heat treatment transforms to a composite of cubic oxynitride and corundum oxide. Both friction and wear of samples from the entire investigated compositional range were studied at room temperature and 600
°C. The low wear rates observed for the oxynitride coatings underline their potential for use in turning and milling applications.</abstract><cop>Amsterdam</cop><pub>Elsevier B.V</pub><doi>10.1016/j.tsf.2011.08.075</doi><tpages>6</tpages></addata></record> |
| fulltext | fulltext |
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| ispartof | Thin solid films, 2011-12, Vol.520 (5), p.1597-1602 |
| issn | 0040-6090 1879-2731 |
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| recordid | cdi_proquest_miscellaneous_1010872253 |
| source | ScienceDirect Journals (5 years ago - present) |
| subjects | Alumina Coatings Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Deposition by sputtering Exact sciences and technology Face centered cubic lattice Hardness Lattices Materials science Mechanical and acoustical properties Methods of deposition of films and coatings film growth and epitaxy Oxygen content Oxynitride Oxynitrides Physical properties of thin films, nonelectronic Physics Pin-on-disk test Rotating Rotating arc cathodes Structure and morphology thickness Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) TEM Thin film structure and morphology Transmission electron microscopy α-(Al,Cr) 2O 3 |
| title | Correlation between anionic substitution and structural properties in AlCr(O xN 1−x) coatings deposited by lateral rotating cathode arc PVD |
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