Metamorphic In0.53Ga0.47As/In0.52Al0.48 As HEMTs on germanium substrates

Devices with 0.2 μm gate length display an increase of the extrinsic cut-off frequency fT from 45 GHz before, to 75 GHz after substrate removal, whereas the maximum oscillation frequency fmax increases from 68 GHz to 95 GHz.

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Veröffentlicht in:IEEE electron device letters 2000-02, Vol.21 (2), p.57
Hauptverfasser: van der Zanden, K, Schreurs, D, Mijlemans, P, Borghs, G
Format: Artikel
Sprache:eng
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Zusammenfassung:Devices with 0.2 μm gate length display an increase of the extrinsic cut-off frequency fT from 45 GHz before, to 75 GHz after substrate removal, whereas the maximum oscillation frequency fmax increases from 68 GHz to 95 GHz.
ISSN:0741-3106
1558-0563
DOI:10.1109/55.821666