Microtechnology and microsystems in measurement applications

Microtechnology has made inroads into metrology. MEMS structures in thermal RMS-to-DC conversion are at a mature stage. Many more applications are in their infancy and require more basic and applied research. Next to metrology, these may open doors to the higher performance instruments. A characteri...

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Veröffentlicht in:	IEEE instrumentation & measurement magazine 2001-09, Vol.4 (3), p.21-23
Hauptverfasser:	Wolffenbuffel, R.F., van Mullem, C.J.
Format:	Magazinearticle
Sprache:	eng
Schlagworte:	Biomembranes Conversion Doors Electrostatics Instrumentation Integrated circuit measurements Metrology Microelectronics Micromachining Microtechnology Reproducibility Residual stresses Resistors Temperature measurement Thermal force Thermal resistance Voltage
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