Electrical Conduction Properties of SiC Modified by Femtosecond Laser

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Veröffentlicht in:Journal of laser micro nanoengineering 2012-02, Vol.7 (1), p.16-20
1. Verfasser: Ito, Takuto Ito
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title Electrical Conduction Properties of SiC Modified by Femtosecond Laser
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