Variation in the Etch Rate of LIBWE Fabricating Deep Microtrenches
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| Veröffentlicht in: | Journal of laser micro nanoengineering 2012-02, Vol.7 (1), p.81-86 |
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| Format: | Artikel |
| Sprache: | eng |
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| container_end_page | 86 |
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| container_issue | 1 |
| container_start_page | 81 |
| container_title | Journal of laser micro nanoengineering |
| container_volume | 7 |
| creator | Sato, Tadatake |
| description | |
| doi_str_mv | 10.2961/jlmn.2012.01.0016 |
| format | Article |
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| fulltext | fulltext |
| identifier | ISSN: 1880-0688 |
| ispartof | Journal of laser micro nanoengineering, 2012-02, Vol.7 (1), p.81-86 |
| issn | 1880-0688 1880-0688 |
| language | eng |
| recordid | cdi_proquest_journals_938069982 |
| source | EZB Electronic Journals Library |
| title | Variation in the Etch Rate of LIBWE Fabricating Deep Microtrenches |
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